激光清洗监测技术研究进展(特邀)

Research progress of laser cleaning monitoring technology (invited)

  • 摘要: 激光清洗技术具有非接触、精度高、对基材损伤小、绿色环保等众多优点,在智能制造中发挥越来越重要的作用。随着激光清洗技术的发展,对激光清洗质量的快速检测及精准评价的需求越来越迫切。在激光清洗过程中,激光与待清洗层、基底发生作用,通过采集分析激光与物质相互作用过程中产生的光、声等信号和表面特性变化,可以实现对清洗过程和清洗效果的实时表征,完成对激光清洗的监控,目前逐渐被广泛地应用到自动化激光精密清洗过程中。文中分析和总结了声波监测法、光谱监测法和图像监测法等激光清洗监测技术的工作原理及研究进展,展望了激光清洗监测技术的未来发展趋势。

     

    Abstract: Laser cleaning technology has many advantages, such as non-contact, high cleaning accuracy, minor damage to the substrate, and being environmentally friendly. It plays an increasingly important role in intelligent manufacturing. With the development of laser cleaning technology, the need for rapid detection and accurate evaluation of laser cleaning quality is becoming increasingly urgent. The laser interacts with the layer to be cleaned and the substrate during laser cleaning. By collecting and analyzing the light, sound, and other signals and surface characteristics changes during the interaction between laser and substance, real-time characterization of the cleaning process and results can be realized, which is gradually widely used in the automated laser precision cleaning process. This review summarizes the working principle and research progress of laser cleaning monitoring technologies such as acoustic wave monitoring, spectral, and image monitoring. The possible future development and trend of laser cleaning monitoring technology are also discussed.

     

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