紧凑型双路TEA CO2激光器谐振腔热稳定性及补偿

Thermal stability and compensation of compact dual-path TEA CO2 laser resonant cavities

  • 摘要: 通过实验和仿真的方法,研究了多点分布的内部热源加热作用对紧凑型双路TEA CO2激光器谐振腔热稳定性的影响。采用直流风扇热交换抑制了高压电源的局部加热效应,通过调整热交换的效率,可在13~22 ℃环境温度范围内,使前后谐振腔镜受到的局部加热形变作用和环境温度引起的热胀冷缩作用基本抵消。为实现更宽温度范围的谐振腔稳定性,在有效热交换措施的基础上,根据模拟预测的形变规律,提出了谐振腔变形的角度补偿方法。使用传感器获得环境温度与设定初始环境温度的偏差,通过调整伺服电机步数实现对方位角的补偿,补偿值约0.28 step/℃,通过PZT促动器调整悬臂调谐结构末端位移,实现对俯仰角的补偿,补偿值约0.79 μm/℃。

     

    Abstract:
      Objective  Transversely Excited Atmospheric (TEA) CO2 laser can achieve tunable output at 9-11 μm which covers several atmospheric windows. It has improved a lot towards higher peak power and repetition frequency in the applications such as laser radar and laser manufacturing since the beginning of the 21st century. Heat effect as a product of gas discharging may bring unwelcomed effects on laser components and parts. Previous researches mainly focused on thermal deformation of laser windows under the situation of multi-kilowatt output. With the finite element theory, specific deformation data features were studied and corresponding compensation methods were proposed as well. However, thermal deformation of laser resonant cavities was commonly neglected as the huge bulk of cavities had large thermal capacity and good heat dissipation. With the recent development of lidar applications, opposite demand of TEA CO2 lasers for small size and high reliability was put forward. Consequently, thermal deformation of resonant cavity instead of laser window is more likely to take place due to local heat effect. By far rare research works were carried out on this topic. For this purpose, thermal stability and compensation of compact dual-path TEA CO2 laser resonant cavities were studied.
      Methods  A compact dual-path TEA CO2 laser was developed. Deformation of resonant cavity in the action of local heat effect was measured with an indication beam (Fig.2, Eq.(14)). It was also simulated in both azimuth and pitch directions with Ansys Workbench (Fig.4-5). Hypothesis of the deformation counteract by balancing the local heat effect with thermal expansion was calculated (Fig.7) and experimentally realized by an axial flow DC fan assisted heat extraction structure (Fig.6, Fig.8). Moreover, angular compensation measures were taken after restraining the local heat effect. The azimuth angular compensation was achieved by adjusting servo motor steps under different ambient temperatures. The pitch angular compensation was realized by changing the bottom displacement of the cantilever tuning structure with a PZT actuator.
      Results and Discussions  The angular deviation of resonant cavity mirrors changed linearly regardless the presence of local heat effect. While local heat effect caused unequal angular deviation between resonant cavity mirrors. By adjusting heat exchanging efficiency, local heat and overall heat expansion reached a balanced counteraction in cavity deformation, thus the deviation of resonant cavities mirrors was limited to a low level within 13-22 ℃. Output pulse energies decreased more gently in the condition of enhanced heat exchange. Angular compensation slopes were confirmed to realize the stability of resonant cavities within a wider temperature range, they were 0.28 step/℃ for servo motor in the azimuth direction and 0.79 μm/℃ for PZT actuator in the pitch direction respectively.
      Conclusions  Thermal stability and compensation of compact dual-path TEA CO2 laser resonant cavities was studied. The heat effect of distributed inner heat sources was studied both in experimental and simulated method. Active heat exchange plan by adopting an axial flow DC fan was adopted to constrain the local heat effect. Hypothesis of the deformation counteract between local heat effect and thermal expansion was proposed and demonstrated. Moreover, the adaptability in wider temperature range was realized by precise angular compensation. Investigation results provided comprehensive view about thermal deformation in compact volume and angular compensation idea would be a reference for similar laser devices.

     

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