碲镉汞光子计数型线性雪崩探测器(特邀)

Linear-mode HgCdTe avalanche photodiode detectors for photon-counting applications (invited)

  • 摘要: 单光子计数技术在弱信号探测和时间测距中具有重大的应用前景。自从20世纪70年代可见光的光子计数系统研发以来,国际上该领域内的研发小组在不断地发展完善光子计数技术,充分放大光子信号,以降低电子设备的读出噪声。电子倍增电荷耦合器件(Electron Multiplying Charge Coupled Devices, EMCCDs)具有更高的量子效率,可替代传统的可见光光子计数系统,但较大的雪崩噪声阻碍了倍增下入射光子数的准确获取。碲镉汞线性雪崩器件(HgCdTe APD)的过剩噪声因子接近1,几乎无过剩噪声;相对于盖革模式的雪崩器件,没有死时间和后脉冲,不需要淬灭电路,具有超高动态范围,光谱响应范围宽且可调,探测效率和误计数率可独立优化,开辟了红外波段光子计数成像的新应用领域,在天文探测、激光雷达、自由空间通信等应用中具有重要价值。美国雷神(Raytheon)公司和DRS技术公司、法国CEA/LETI实验室和Lynred公司、英国Leonardo公司先后实现了碲镉汞线性雪崩探测器的单光子计数。文中总结了欧美国家在碲镉汞光子计数型线性雪崩探测器研究方面的技术路线和研究现状,分析了吸收倍增分离型(Separation of Absorption and Magnification, SAM)、平面PIN型和高密度垂直集成型(High Density Vertically Integrated Photodiode, HDVIP)三种结构的HgCdTe APD器件性能、光子计数能力以及制备优缺点。雷神公司采用分子束外延(Molecular-Beam Epitaxy, MBE)方式制备了空穴倍增机制的SAM型短波HgCdTe APD器件,增益可达350,光子探测效率达95%以上,工作温度达180 K以上。DRS技术公司采用液相外延(Liquid Phase Epitaxy, LPE)碲镉汞材料制备了电子倍增机制的HDVIP型中波HgCdTe APD器件,在0.4~4.3 μm的可见光到中红外波段都能响应,最高增益可达6100,光子探测效率大于70%,可实现110 Mbps的自由空间通信。CEA/LETI实验室和Lynred公司采用分子束外延或液相外延制备了电子倍增机制的PIN型短波和中波HgCdTe APD器件,短波器件增益达2 000,中波最高增益可达13000,内光子探测效率达90%,实现了80 Mbps的自由空间通信,在300 K和增益为1时,带宽最高达10 GHz。英国Leonardo公司采用金属有机气相沉积(Metal Organic Vapor Phase Epitaxy, MOVPE)方式制备了电子倍增机制的SAM型短波HgCdTe APD器件,命名为Selex Avalanche Photodiode HgCdTe Infrared Array(SAPHIRA),器件增益可达66@14.5 V,单光子探测率达90%以上,中心距为24 μm的320×256阵列的SAPHIRA器件供给法国First Light Imaging公司,研发出了C-RED ONE相机,相机成功应用于美国天文探测的密歇根红外组合器(Michigan Infrared Combiner, MIRC),将MIRC的系统噪声降低了10~30倍,大大提高了条纹探测的信噪比。国内碲镉汞雪崩探测器研究起步比较晚,主要研究机构有中国科学院上海技术物理研究所、昆明物理研究所和华北光电技术研究所,受限于芯片制备技术和电路技术,目前没有实现光子计数方面的应用,但在焦平面研制上取得了一定进展。中国科学院上海技术物理研究所研制了PIN结构的单元、128×128阵列、320×256阵列中波HgCdTe APD器件,器件增益可达1000以上,增益100以内,增益归一化暗电流密度低于1×10−7 A/cm2,增益400以内的过剩噪声因子小于1.5,增益133时的噪声等效光子数为12,进行了短积分快速成像演示;单元器件带宽可达300~600 MHz。昆明物理研究所研制了PIN结构的单元和256×256阵列的中波HgCdTe APD器件,单元器件增益可达1000以上;在偏压8.5 V以内,焦平面平均增益归一化暗电流为9.0×10−14~ 1.6×10−13 A,过噪因子F介于1.0~1.5之间。国内主要是研制平面PIN结构的HgCdTe APD器件,技术路径与法国基本相同。因而,我国可借鉴CEA/LETI实验室成功经验和Lynred公司的运营模式,持续推进HgCdTe APD器件的研究,以早日达到国际先进水平,实现单光子探测和光子计数应用。

     

    Abstract:
      Significance   Single-photon counting has great application prospects in weak signal detection and time ranging. Since the first photon counting system in the visible spectrum was developed in the 1970s, in order to fully amplify the photon signal and reduce the readout noise of electronic equipments, many groups in the research field are constantly developing and improving the photon counting techniques. Electron multiplying charge coupled devices (EMCCDs) can replace the traditional visible light photon counting system and have higher quantum efficiency. While due to large avalanche noise, accurate acquisition of incident photon number under multiplication is difficult. The excess noise factor of mercury cadmium telluride avalanche photodiode (HgCdTe APD) is close to 1, there is almost no excess noise. Compared with the Geiger mode avalanche photodiodes, the linear mode HgCdTe APD has no dead time and after pulse, does not need to quench the circuit, has ultra-high dynamic range and adjustable spectrum with wide response range. Its detection efficiency and false count rate can be independently optimized. It opens up a new infrared photon band counting imaging application. It is of great value in astronomical exploration, laser radar, free space communication and other applications.
      Progress   Raytheon and DRS Technologies in the United States, CEA/LETI Laboratory and Lynred in France, and Leonardo in the United Kingdom have successively realized single photon counting of linear HgCdTe APD detectors. This paper summarizes the technical routes and research status of linear mode photon counting HgCdTe APD detectors in Europe and America. The performance of HgCdTe APDs, photon counting ability and the advantages and disadvantages of detector preparation with three structures, namely, separation of absorption and amplification (SAM), planar PIN type and high density vertically integrated photodiode (HDVIP), are analyzed. Raytheon Company has prepared SAM short-wave HgCdTe APD detectors with hole multiplication mechanism by molecular beam epitaxy (MBE), with gain of 350, photon detection efficiency of more than 95% and operating temperature of more than 180 K. DRS Technologies has prepared an electron-multiplication HDVIP medium wave HgCdTe APD detector using liquid phase epitaxy (LPE) material. The detector can respond in the visible to mid-infrared band from 0.4 μm to 4.3 μm, with the highest gain up to 6100 and the photon detection efficiency greater than 70%. It can realize free space communication of 110 Mbps data transfer. CEA/LETI Laboratory and Lynred Company have prepared PIN-type short-wave and medium-wave HgCdTe APD detectors with electron multiplication mechanism by molecular beam epitaxy or liquid phase epitaxy. The gain of short-wave detector is up to 2 000, the maximum gain of medium-wave is up to 13000, the internal photon detection efficiency is up to 90%, the free space communication of 80 Mbps data transfer is realized, and bandwidth up to 10 GHz is achieved at 300 K and gain of 1. British Leonardo Company has prepared SAM type HgCdTe APD detector with electron multiplication mechanism by metal organic vapor deposition (MOVPE). The detectors were named Selex Avalanche Photodiode HgCdTe Infrared Array (SAPHIRA), the device gain can reach 66@14.5 V, single photon detection efficiency is more than 90%. A 24 μm pitch 320×256 array SAPHIRA detectors were supplied to First Light Imaging Company in France to develop a C-RED ONE camera. The C-RED ONE camera was successfully applied to the Michigan Infrared Combiner (MIRC) for astronomical exploration in the United States, which reduced the system noise of MIRC by 10 to 30 times and greatly improved the signal-to-noise ratio of fringe detection. The research on HgCdTe APD detectors started relatively late in China. The main research institutions include Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Kunming Institute of Physics and North China Research Institute of Electro-Optics. Limited by chip preparation technology and circuit technology of HgCdTe APDs, the ability of photon counting has not been realized at present, but some progress has been made in the development of focal plane at home. The single element, 128×128 array and 320×256 array medium wave HgCdTe APD detectors with PIN structure are developed by Shanghai Institute of Technical Physics, Chinsese Academy of Sciences. The gain of the detectors can reach more than 1000, the gain normalized dark current density is less than 1×10−7 A/cm2 within the gain of 100, and the excess noise factor is less than 1.5 within the gain of 400. At the gain of 133, the noise equivalent photon number is 12, and the short integration time fast imaging is demonstrated. Bandwidth of single element detector is up to 300-600 MHz. The single element and 256×256 array medium wave HgCdTe APD device with PIN structure are developed in Kunming Institute of Physics. The gain of the single element detector can reach more than 1 000. When the bias voltage is less than 8.5 V, the average gain normalized dark current of focal plane is 9.0×10−14-1.6×10−13 A, and the excess noise factor F is between 1.0 and 1.5.
      Conclusions and Prospects   In China, HgCdTe APD devices with planar PIN structure are mainly developed, and the technical path is basically the same as that of France. Therefore, our country can learn from the successful experience of CEA/LETI Laboratory and the business model of Lynred Company, and continue to promote research on HgCdTe APD detectors in order to reach the international advanced level as soon as possible, and realize single-photon detection and photon counting application.

     

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