熊玉朋, 路文文, 黄铖, 陈付磊, 陈善勇. 可见光/近红外成像系统共轴折叠反射镜干涉检测技术(特邀)[J]. 红外与激光工程, 2023, 52(6): 20230175. DOI: 10.3788/IRLA20230175
引用本文: 熊玉朋, 路文文, 黄铖, 陈付磊, 陈善勇. 可见光/近红外成像系统共轴折叠反射镜干涉检测技术(特邀)[J]. 红外与激光工程, 2023, 52(6): 20230175. DOI: 10.3788/IRLA20230175
Xiong Yupeng, Lu Wenwen, Huang Cheng, Chen Fulei, Chen Shanyong. Interferometric test of coaxial folded mirrors for visible/near-infrared imaging systems (invited)[J]. Infrared and Laser Engineering, 2023, 52(6): 20230175. DOI: 10.3788/IRLA20230175
Citation: Xiong Yupeng, Lu Wenwen, Huang Cheng, Chen Fulei, Chen Shanyong. Interferometric test of coaxial folded mirrors for visible/near-infrared imaging systems (invited)[J]. Infrared and Laser Engineering, 2023, 52(6): 20230175. DOI: 10.3788/IRLA20230175

可见光/近红外成像系统共轴折叠反射镜干涉检测技术(特邀)

Interferometric test of coaxial folded mirrors for visible/near-infrared imaging systems (invited)

  • 摘要: 由共用镜坯、径向折叠的多个环带反射镜组成的成像系统具有紧凑化、免装调的特点。为确保各反射镜的面形精度和相互位姿精度,提出了计算全息(Computer Generated Hologram, CGH)补偿干涉测量方法。针对可见光/近红外成像需求,基于共轴折叠思路设计了环带四反射镜成像系统;应用金刚石车削工艺加工了多环带共体反射镜;重点针对其中共体的主镜、三镜和次镜、四镜分别设计了CGH补偿器,通过合理选择离焦载频和CGH轴向位置,有效分离了干扰衍射级次的鬼像,实现了多个反射镜面形与相互位姿误差的同步检测。干涉测量结果表明,多个反射镜同时达到接近零条纹状态,面形精度和相互位姿精度较高,且无鬼像干扰。系统对100 m远处目标探测实验表明,反射镜不需要额外装调即可实现良好成像,具有集成度高、研制周期短、成像质量高的优点。

     

    Abstract:
      Objective  Photoelectric imaging system serves as the “eye” of all kinds of equipment, which plays an indispensable role in scene detection and target recognition. To acquire more abundant target information, one of the development directions is multi-band fusion detection. However, the existing multi-band imaging system mostly adopts the discrete structure, with large system volume architecture, high manufacturing cost, and lack of spatial consistency due to parallax between the discrete systems. The challenges pose difficulties in image fusion and other back-end processing. Multi-band common aperture, also a common configuration, is generally used to split the front optical path with optical components, and subsequently respond to the detection requirements of different bands through the discrete rear optical path. To address these issues, coaxial folded mirrors for visible/near-infrared imaging systems are designed in this paper.
      Methods  To guarantee the surface accuracy and relative orientation accuracy for multiple mirrors, an interferometric null test with a computer-generated hologram (CGH) is proposed (Fig.5). Diamond turning technology is applied to machining the mirrors. In this approach, two CGHs are designed for the null test of the monolithic primary/tertiary mirrors and the monolithic secondary/fourth mirrors (Fig.6, Fig.9). Ghost image of disturbance orders of diffraction is effectively separated by properly choosing the power carrier and the axial position of the CGH. A single CGH is capable of simultaneously measuring both the surface error and the relative orientation error of multiple mirrors (Fig.8). The result of the interferometric null test shows multiple mirrors are measured with nearly null fringes, indicating high accuracy in terms of surface form and orientation. Moreover, no ghost disturbance is observed.
      Results and Discussions   The optical components undergo the diamond turning process, and the mirror blank is shared among the primary mirror and the three additional mirrors, allowing for simultaneous processing (Fig.12). After processing, a CGH is used to conduct zero compensation measurements on both mirrors (Fig.13). The measured surface shape error is shown (Fig.14), and the primary mirror and the three mirrors demonstrate a combined surface shaper error of PV 0.87λ, RMS 0.12λ; Interference diagram reveals that the ghost image stripes only exist outside the main mirror and the three mirror stripes, and they do not form interference. The primary mirror and the three mirrors reach a near-zero fringe state at the same time, indicating a high level of surface shape accuracy and mutual pose accuracy (reaching the sub-wavelength level), which meets the imaging requirements of the system.
      Conclusions  The study proposes an interferometric null test with a CGH for the coaxial folded mirrors in visible/near-infrared imaging systems. The method involves the creation of multiple holographic regions with different functions on the same CGH substrate, which allows for the generation of the aspheric wavefronts of different shapes after the diffraction of the incident test wavefront. Consequently, the zero position of different mirror shapes can be tested at the same time. Following ultra-precision machining based on CGH compensation measurement, the mirror shape accuracy and pose accuracy attain a sub-wavelength level, which realizes direct assembly without additional assembly and adjustment for optimal imaging performance. Similarly, by positioning reference processing, multiple similar systems are nested coaxially, which enables multi-band coaxial imaging from visible light to near-infrared. Such capability holds obvious advantages for unmanned platform target detection and fast image fusion processing.

     

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