用于三角测量大数值孔径双远心光学系统设计

Optical design of bi-telecentric system with large numerical aperture for the triangulation measurement

  • 摘要: 测量不确定度是与测量结果紧密相关的重要指标,反映了仪器测量的稳定性。激光三角测量仪器的测量不确定度与成像光学系统数值孔径直接相关,增大数值孔径能够有效降低测量不确定度。为了满足高精度测量需求,应用二维Q-type多项式自由曲面,设计用于线激光三角测量仪的大数值孔径双远心Scheimpflug成像光学系统。首先基于三角测量原理和线激光三角测量仪指标分析成像光学系统参数,然后结合像差灵敏度分析以及自由曲面像差特性,确定成像光学系统中自由曲面的位置和数量并进行优化设计。设计得到系统的数值孔径为0.2,成像范围为10 mm×14 mm,调制传递函数(MTF)优于0.6,最大畸变为0.21%,远心度优于0.3°。该系统具有大孔径、成像质量好、畸变小、双远心的特点,能够满足高精度线激光三角测量仪的应用需求。

     

    Abstract:
    Objective With the development of technology and the requirement of industrial manufacturing, the automatic measurement of key dimensions of products in the production process has gradually replaced the traditional manual measurement. As a non-contact measuring instrument, line laser triangulation instrument has the advantages of simple structure, small size and wide application. However, the uncertainty of measurement for this instrument is physically limited by the speckle, which are formed when the measured surface is illuminated by the laser. Fortunately, this uncertainty can be improved by reducing the laser wavelength or increasing the numerical aperture of the optical system. Lasers with a short wavelength of 405 nm are already widely used in triangulation instruments, and increasing the numerical aperture of the optical system is another one method to further reduce the measurement uncertainty. However, the further increase of numerical aperture brings great difficulties to the design of optical systems while keeping the field of view unchanged.
    Methods To improve the measurement uncertainty of the line laser triangulation measurement instrument, this paper designs a bi-telecentric system with large numerical aperture with the two-dimensional Q-type polynomial freeform surface. Firstly, the working principle of the triangulation measurement instrument is introduced. Based on the principle and the specifications of the line laser triangulation measurement instrument, the parameters of the imaging optical system are analyzed. Then, the optical system based on double-Gauss optical layout is designed and the optical stop is placed on the focal plane of front group and back group. The position and number of freeform surfaces in the imaging optical system are determined by using the aberration sensitivity analysis and the freeform surface aberration characteristics. Finally, the optical system is optimized with optical design software to achieve the best performance.
    Results and Discussions Two-dimensional Q-type polynomial freeform surfaces are set to each surface, and the RMS radius of the system point diagram was used as the error function to determine the contribution degree of each surface to aberration optimization. The final choice is to set the surfaces S2, S6, S9, and S14 as two-dimensional Q-type polynomial free surfaces. After optimization, the optical system is consisted of seven lenses, four of which are based on two-dimensional Q-type polynomial freeform. The designed system has a numerical aperture of 0.2, and an field of view of 10 mm×14 mm. The design results of this system are evaluated using RMS radius of the spot diagram, modulation transfer function (MTF) distortion and telecentricity. The MTF of the system is better than 0.6, the maximum distortion is 0.21%, and the telecentricity is less than 0.3° for the objective and image sides.
    Conclusions Line laser triangulation measurement instrument is a high-precision, small-size and widely used measuring instrument. It can meet the demand for high-speed measurement of product dimensions in industrial production. A large numerical aperture telecentric Scheimpflug imaging optical system for line laser triangulation is designed using a two-dimensional Q-type polynomial free-form surface. Compared with the spherical system, the imaging quality of the system is improved without increasing the number of lenses and the system size. The designed optical system has the advantages of large numerical aperture, double telecentricity and high imaging quality, which can effectively improve the measurement uncertainty of the instrument. It has important application in triangulation instruments with high measurement accuracy.

     

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