基于波导倏逝耦合的硅基片上量子点激光器的仿真设计

Quantum dot lasers on silicon substrates through evanescent coupling

  • 摘要: 针对目前硅基光电子芯片缺失片上光源这一问题,设计了一种基于波导倏逝耦合的硅基片上量子点激光器。整体结构基于绝缘体上硅(Silicon on Insulator,SOI)平台引入倏逝波耦合结构来完成量子点增益芯片和波导间的耦合,利用布拉格光栅形成激光腔体来完成光放大和波长选择功能。通过Lumerical仿真软件对O波段硅基片上光源的锥形(taper)耦合器结构和布拉格光栅结构进行了优化。结果表明,长142 μm的锥形耦合器具有最高的耦合效率;长于30 μm的锥形光斑塑形波导可以使光束以更低损耗在片上传输;优化后的布拉格光栅在波导两端的长度为110 μm和240 μm,分别实现了40%和90%的反射率。两段布拉格光栅形成谐振腔,放大并选择出1.31 μm波长。文中设计显著提高了硅基片上光源整体的发光效率并降低了成本,实现了超过98%的耦合效率,且与CMOS(Complementary Metal Oxide Semiconductor)工艺兼容。相关研究结果可为后续工艺设计和实验验证提供数据支持。

     

    Abstract:
    Objective The integration of on-chip silicon-based light sources has been a critical challenge in addressing the absence of light sources in silicon-based optoelectronic chips. This integration is essential for enhancing the power output of light sources on silicon-based optoelectronic chips, thereby increasing the chip's speed and capacity. However, traditional integration methods such as end-face coupling suffer from low efficiency due to issues like surface roughness and alignment difficulties, which are difficult to mitigate. Therefore, this paper proposes a method for light source integration using evanescent coupling, which can improve light source coupling efficiency and increase the output power of silicon-based on-chip light sources. Furthermore, traditional silicon-based light source integration typically employs quantum well lasers, whereas this study designs an appropriate quantum dot laser, which offers advantages such as lower threshold current and more stable temperature tolerance. These benefits enhance the overall coupling efficiency and output power of the silicon-based on-chip quantum dot laser.
    Methods Using Lumerical simulation software, we optimized the evanescent coupling waveguide structure and the Bragg grating waveguide structure for an O-band silicon-based on-chip light source. At a wavelength of 1.31 μm, the tapered waveguide structure designed for evanescent coupling achieved a coupling efficiency of over 98% for widths of 0.68 μm, 0.7 μm, and 0.75 μm (Fig.4). The study primarily analyzed the impact of length on coupling efficiency. Additionally, we designed two segments of Bragg gratings to form a resonant cavity, with the paper focusing on the effects of duty cycle, etch depth, and grating length on reflectivity (Fig.7). This structure can achieve reflectivities of 40% and 90% at the three specified waveguide widths, allowing for the amplification and selection of light at a wavelength of 1.31 μm (Fig.8).
    Results and Discussions Through waveguide mode analysis, a waveguide layer thickness of 220 nm was selected, with waveguide widths of 0.68 μm, 0.7 μm, and 0.75 μm. For these three waveguide widths at a wavelength of 1.31 μm, we designed a tapered waveguide coupler structure with a length of 32 μm, where the width transitions from the waveguide width to 2 μm and then narrows back to the original waveguide width, achieving a coupling efficiency of over 98%. A Bragg grating structure was designed with an etch depth of 100 nm and a duty cycle of 0.75 on both sides, with lengths of 110 μm and 240 μm, achieving reflectivities of 40% and 90%, respectively. These two Bragg gratings form a resonant cavity that amplifies and selects light at a wavelength of 1.31 μm.
    Conclusions This study focuses on silicon-based light sources, with particular emphasis on coupling efficiency, wavelength selection, and integration. Specifically, we designed a 142 μm tapered evanescent coupling structure, achieving a coupling efficiency of over 98%. The Bragg gratings, serving as both mirrors and resonators, are positioned on both sides of the waveguide, with lengths of 110 μm and 240 μm, respectively. These gratings selectively amplify light at a wavelength of 1.31 μm by facilitating oscillation within the cavity. This design not only enhances the emission efficiency of silicon-based light sources but also reduces manufacturing costs and is highly compatible with existing silicon-based photonic manufacturing processes. Compared to previous studies, our work achieves efficient light source integration and single-sided narrowband laser output by optimizing the coupling structure and mirrors.

     

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