面向镜面面形可检测性的离轴三反光学系统设计方法

Design method of off-axis three-mirror optical system for testability of mirror surface shape error

  • 摘要: 光学系统镜面面形的可检测性是光学系统从设计走向应用的基本条件。目前的光学系统设计方法多侧重于约束外形尺寸、提高成像质量,光学系统设计和光学元件检测设计与评估经常是先后进行的,在系统设计时不直接得到检测性的反馈。对于高指标要求的光学系统,容易造成系统像质设计良好、但元件检测难度过大的情况,使光学系统的落地应用产生瓶颈。在光学系统优化设计过程中,融入检测的相关理论方法是解决光学元件面形可检测性的重要途经。以离轴三反光学系统设计为切入点,CGH (Computer Generated Hologram)为光学元件检测工具,推导了光学系统设计参数与CGH相关参数的数学关系,作为光学系统面形的可检测性的桥梁,建立了面向镜面面形可检测性评估的离轴三反光学系统设计方法。在设计验证环节,以焦距为800 mm、F数为4、视场为14°×2°的离轴三反系统为例进行了设计仿真,在保证系统像质(调制传递函数 (Modulation Transfer Function, MTF) 值大于0.4@100 lp/mm)的同时,将用于检测的CGH最小条纹宽度从4.84 μm提升到14.34 μm,提高了非球面反射镜的可检测性。该设计方法实现了在光学设计中对检测参数的评估与控制,对降低光学元件检测难度、提高光学系统设计的可实现性具有一定意义。

     

    Abstract:
    Objective The testability of mirror surface shape error is a fundamental requirement for high-precision optical systems from design to application, failure to test means that it can't be manufactured. Currently, many optical system design methods focus on improving system performance and imaging quality. The public reporting on methods for directly assessing surface shape error testability during the design process is limited. Traditionally, the design of optical systems and the testing of optical elements often occur sequentially, without direct feedback on the testability during optical design. For high-performance optical systems, this can lead to the situation where the system design is excellent, but the difficulty of element testing is too high, resulting in bottlenecks in the practical application. Integrating relevant theoretical methods for testing into the process of optical systems design is an important way to solve the testability of optical component surface shape error. This approach has significant implications for reducing testing difficulties, fully exploring the potential of optical design and improving the feasibility of optical systems.
    Methods In theoretical research, the research starts with the design of an off-axis three-mirror optical system as the theoretical entry point, using Computer Generated Holograms (CGH) as the test tool for optical element surface shapes error. Based on the surface shape characterization equation and CGH testing principles, mathematical relationships between the optical design parameters and CGH-related parameters are derived. This relationship act as a bridge for the testability of optical system surface shapes, thereby establishing a design method for off-axis three-mirror optical systems based on surface shape testability evaluation. In the design validation stage, an off-axis three-mirror optical system with a focal length of 800 mm, an F-number of 4, and a field of view of 14°×2° is taken as an example to validate the proposed design method based on surface shape testability evaluation
    Results and Discussions The final result of the off-axis three-mirror optical system is shown in Figure 10. The system meets the requirements for image quality and design specifications, with the value of the Modulation Transfer Function (MTF) at 100 lp/mm exceeding 0.4 across all fields of view. Using this design method, the minimum line width of CGH used to test the system's tertiary mirrors has been increased from 4.84 μm to 14.34 μm, enhancing both the testability of optical system surface shapes and the manufacturability of CGH.
    Conclusions Based on the principles of CGH testing and the surface characterization equations of optical elements, mathematical relationships between optical system design parameters of optical systems and the relevant parameters of CGH have been derived and a design method for off-axis three-mirror optical systems based on surface shape testability evaluation is proposed. Using this method, an off-axis three-mirror optical system with a focal length of 800 mm, an F-number of 4, and a field of view of 14°×2° was designed. The system shows good image quality, with MTF values exceeding 0.40 at 100 lp/mm across all fields of view. The design results demonstrate that compared to conventional off-axis three-mirror optical systems, this design method not only ensures imaging quality but also achieves calculation and control of the CGH-related parameters. It significantly enhances the testability of surface shapes and holds certain significance in reducing the difficulty of optical element testing and improving the feasibility of optical systems.

     

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