Abstract: Deep brain stimulation (DBS) is effective for treating some diseases, such as epilepsy, Parkinson's disease or depression. DBS electrode is a key part of a DBS system. The current DBS electrode has four large contacts, and the stimulation resolution is low and the stimulation to unnecessary area of brain tissue may cause side effects. To improve the resolution and precision of the deep brain stimulation, a flexible electrode with multi-contact was designed and produced through a Micro-Electro-Mechanical Systems (MEMS) fabrication method. The new electrode consisted of 24 small contacts. Each electrode contact is 285 m 1500 m. The micro machining techniques were applied for the electrode fabrication using biocompatible materials Parylene C as the substrate and Au as electrode material respectively. The characteristics of the electrode were physically tested. The electrode has a smooth surface, distinct outline and good electrical properties with low impedance. The MEMS technology is suitable for the deep brain stimulation electrode production. This research would provide a basis for developing better 3-D deep brain stimulation strategy.