Abstract: The research on thermal wave scattering problem of the defect inside the material before presuming no heteroplasmon inside the hole and the boundary condition was adiabatic. Based on non-Fourier heat conduction law, employing the methods of wave function expansion, the thermal scattered and temperature distribution in semi-infinite material with subsurface spherical heteroplasmon defects was investigated. The analytical solution and the numerical calculation result of the problem were presented. The effects of physical and geometrical parameter of defects and the incident wave number on surface temperature distribution of the semi-infinite material were analyzed. Result has shown that the physical and geometrical parameter of the heteroplamon have great influence on the surface temperature of the material. And the main influence factors include non-dimensional heat conductivity coefficient, non-dimensional thermal diffusion length, non-dimensional buried depth and so on.