张明月, 杨洪波. 基于大位移柔性结构的动镜支撑机构设计及研究[J]. 红外与激光工程, 2014, 43(8): 2595-2601.
引用本文: 张明月, 杨洪波. 基于大位移柔性结构的动镜支撑机构设计及研究[J]. 红外与激光工程, 2014, 43(8): 2595-2601.
Zhang Mingyue, Yang Hongbo. Design and research of moving mirror supporting mechanism based on large displacement flexible structure[J]. Infrared and Laser Engineering, 2014, 43(8): 2595-2601.
Citation: Zhang Mingyue, Yang Hongbo. Design and research of moving mirror supporting mechanism based on large displacement flexible structure[J]. Infrared and Laser Engineering, 2014, 43(8): 2595-2601.

基于大位移柔性结构的动镜支撑机构设计及研究

Design and research of moving mirror supporting mechanism based on large displacement flexible structure

  • 摘要: 针对傅里叶红外光谱仪系统对动镜支撑机构高精度高带宽的要求,采用平行簧片结构设计了一种动镜柔性支撑机构。首先分析了平行簧片柔性结构的特点,通过理论分析给出了动镜支撑机构的设计依据,采用有限元方法分析了机构的动态响应和静态响应,同时与两杆移动机构进行了对比,结果表明结构的一阶固有频率为244.79 Hz,系统位移为14 mm时产生的垂直于移动方向的寄生位移为0.611 m,最大应力值为131 MPa,性能明显优于两杆移动机构。通过理论分析和有限元分析为该机构的深入研究和实际应用奠定了良好的基础。

     

    Abstract: According to the requirements of high resolution and high bandwidth on moving mirror supporting mechanism in Fourier transform infrared (FTIR) spectroscopy. A moving mirror supporting mechanism was designed by parallel leaf springs. First, the characteristic of parallel leaf springs was analyzed; and then, the design basis of moving mirror supporting mechanism was presented by theory analysis. Dynamical response and static response were computed with the finite element method. Meanwhile, calculation results were compared with parallel two beam moving mechanism. The results show that the first order natural frequency is 244.79 Hz, the parasite displacement perpendicular to moving direction is 0.611 m when moving displacement is 14 mm, the maximum stress value is 131 MPa. The conclusion is that this mechanism has better performance than two beam moving mechanism and the study lay a good foundation for future research through the theoretical analysis and the numerical simulation.

     

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