基于小波分析的倒装芯片主动红外缺陷检测
Failures detection of flip-chip using active thermography method based on wavelet transform
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摘要: 随着微电子技术的需求和发展,倒装芯片技术在高密度微型化封装领域得到了快速发展和广泛应用,而现有的一些倒装芯片检测方法存在一定的不足之处。为此,研究了主动红外的倒装芯片缺陷检测方法。实验中使用激光加热对倒装样片施加非接触热激励,通过红外热像仪获取样片温度分布。采用小波分析方法提取包括小波熵在内的信号特征,采用自组织神经网络对不同类型焊球进行聚类识别。研究表明,通过自组织神经网络可以有效地将不同缺陷焊球与参考焊球通过距离映射法映射到不同区域从而区分开,并且可以将未知焊球信号映射到相应的区域实现聚类识别。因此该方法可以有效实现倒装芯片的缺陷检测。Abstract: With the development of electronics technology, flip-chip technology has been used extensively in microelectronic packaging. However different disadvantages occurred in traditional detection methods. Therefore, in this paper a novel approach was investigated for solder joint inspection which was based on the active thermography. Non-contact thermal excitation was applied on the specimen, and the temperature distribution of the specimen wss obtained by the infrared camera. Eigenvalues including wavelet entropy were obtained by the wavelet transform process and self-organizing map wss used for data training to classify the signals. The experimental results prove that different defects in the solder bumps can be effectively mapped on different locations by the SOM, and they can be classified and recognized from the reference ones by this method. Therefore, the method investigated in this paper is effective in detecting defects in flip-chips.