Abstract: Low temperature bonding for quartz glass as a reliable solid connection technology has received extensive attention in developed countries in Europe and America, and has been widely used in many fields such as aerospace, basic research, strong laser etc.. Low temperature bonding based on hydroxide-catalyzed hydration/dehydration at the glass surface is a low temperature bonding method with high breaking strength, high precision and high reliability by forming three-dimensional silicate networks at the interface. The physical principle and the basic process of low temperature bonding was demonstrated and the low temperature bonding for quartz glass was realized too. The results of the bonding interface of environmental adaptability test show that, compared with conventional optical contact method, low temperature bonding is superior in bonding strength and adaptability in temperature shock environment and water environment, while low temperature bonding matches optical contact in uniformity, precision, transparency, vacuum seal and adaptability in regular temperature environment and vibration environment.