Abstract: The measurement system of the surface backscattering characteristic was designed and setup in this paper. The send and receive in system was coaxial inhemisphere space. The laser is 1 550 nm linear polarization and narrow linewidth. The backscattering characteristic of grinding, vertical milling and plain milling samples with different surface microstructure was measured at different incidence angles from 0 to 60. The effect of the incident light polarization direction, azimuth angle, incidence angle and the surface microstructure on the backscattering was discussed. The reasons of these effects and the change of backscattering characteristic were analyzed. It was found that the incident light polarization direction, azimuth angle, incidence angle and the surface microstructure had regularity effect on the backscattering. They had both the common law, also had individual character. Surface microstructure determined the backscattering energy distribution and polarization characteristic with the change of incidence azimuth and angles. This result shall provide the reference value to the research of cooperation target measurement field and other surface measuring field.