赵丽美, 关建飞. 硅基结构混合等离子激元波导模式特性的数值研究[J]. 红外与激光工程, 2015, 44(4): 1329-1334.
引用本文: 赵丽美, 关建飞. 硅基结构混合等离子激元波导模式特性的数值研究[J]. 红外与激光工程, 2015, 44(4): 1329-1334.
Zhao Limei, Guan Jianfei. Numerical study on the modal characteristics of silicon-based hybrid plasmonic waveguides[J]. Infrared and Laser Engineering, 2015, 44(4): 1329-1334.
Citation: Zhao Limei, Guan Jianfei. Numerical study on the modal characteristics of silicon-based hybrid plasmonic waveguides[J]. Infrared and Laser Engineering, 2015, 44(4): 1329-1334.

硅基结构混合等离子激元波导模式特性的数值研究

Numerical study on the modal characteristics of silicon-based hybrid plasmonic waveguides

  • 摘要: 首先建立了一种由相同宽度的金属带,SiO2间隔层与Si介质脊构成的导体-夹层-硅基结构(Conductor-Gap-Silicon,CGS)的混合等离子激元波导模型,分析了间隔层的厚度以及波导宽度对模式传输特性的影响,提出了模场面积为0.08 m2与430 m传输距离的设计方案.在此基础上,通过增加数值模型中介质脊的宽度而形成硅基板CGS波导结构.数值分析结果表明:硅基板CGS波导可将模式有效折射率增至2.8,同时传输长度能够延长到1.74 mm.并且模场面积可以进一步压缩到0.025 m2.此外,硅基板CGS波导制作更加简便,并可采用现有COMS制作技术完成,进而具有较大的实用前景.

     

    Abstract: A subwavelength conductor gap silicon(CGS) hybrid plasma waveguide was theoretically analyzed, which consisted of a thin low-index layer sandwiched between a silver strip and a high index silicon structure. The guiding properties of surface plasmon polaritons, such as propagation length and mode field area, were investigated for different rib widths and silica gap layer thickness. As a result, an effective modal area of 0.08 m2 and the propagation length of 430 m can be achieved simultaneously. Based on which, the silicon slab based CGS waveguide can be formed by increasing the width of silicon rib, it should be noted that the structure can generate the larger effective refractive index value of 2.8 and the propagation length of 1.74 mm, moreover, it provided a more strong confinement of the optical field such as 0.025 m2 thickness SiO2 gap. In addition, more simple structure and CMOS compatible fabrication process make these conductor gap silicon plasmonic waveguide a promising candidate for realizing high integration density plasmonic circuits.

     

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