GaAs/Al0.3Ga0.7As 量子阱红外探测器光谱特性研究
Spectroscopic characteristics of GaAs/Al0.3Ga0.7As quantum well infrared photodetectors
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摘要: 采用金属有机物化学气相沉积法(MOCVD)生长GaAs/Al0.3Ga0.7As量子阱材料,制备300 m300 m台面,内电极压焊点面积为20 m20 m,外电极压焊点面积为80 m80 m单元量子阱器件两种。利用傅里叶光谱仪对1#,2#样品进行77K液氮温度光谱响应测试。实验结果显示1#,2#样品峰值响应波长分别为8.43 m,8.32 m,与根据薛定谔方程得到器件理论峰值波长8.5 m间误差分别为1.0%,2.1%。实验结果说明MOCVD技术可以满足QWIP生长制备工艺要求,且器件电极压焊点位置与面积大小对器件峰值波长影响不大,而对峰值电流有一定影响。Abstract: The method of metal chemical vapor deposition(MOVCD) was used to grow the GaAs/Al0.3Ga0.7As quantum well infrared photodetectors(QWIPs). The two sample-devices had large surface area 300 m300 m. But its pressure welding area of electrode in was 20 m20 m while that of the one out was 80 m80 m. Their spectroscopic characteristics were measured at 77K by use of Fourier Transform Spectrometer. The results show that the peak wavelength of 1# and 2# are 8.43 m and 8.32 m respectively. While the theoretical one is 8.5m according to Schrodinger equation. Thus the error between the experimental value and theoretical one of 1# and 2# are 1% and 2.1% respectively. Simulations demonstrate that metal chemical vapor deposition can satisfy quantum well infrared photodetectors processing needs and the different pressure welding area and position of electrode may has no influence on peak wavelength but has some influence on peak photocurrent.