Abstract: To advance the precision of the robot motion is one significant research goal of robot flexible processing issues. In the process, deformation mechanism of heat caused by temperature variation is found as one of the important reasons for affect the positioning error. The temperature compensation method suitable for the industry field was presented and testified through this paper. Effect of robot self-heating and scene environmental temperature factors on axial motion and the ending actuator positioning accuracy were analyzed. The thermal distribution and deformation models were built using finite element theory. Thermal compensation strategy was presented to accomplish the experimental and theoretical analysis of significant correlation between robot kinematics parameters and thermal models above, especially self-heating effect. It was convenient and suitable for industrial field environment. Thermal compensation is experimentally proved to carry the ability to adjust the position error of ending actuator to less than 0.1 mm.