Abstract: Differential absorption lidar is one of important tools for measurement of spatial distribution of ozone in boundary layer. A boundary layer ozone differential absorption lidar system was developed. The stimulated Raman laser in H2/D2 mixtures pumped by the frequency quadrupled Nd:YAG laser at 266 nm was adopted in lidar system. A new Newton telescope received the lidar atmospheric echo. The elastic scattering signals at 288.9 nm and 299 nm were divided into two channels and converted to electrical signals by photomultiplier. Finally the signals were collected by A/D acquisition card for inversion of atmospheric ozone distribution profile. Some ozone data results were given and comparison of ozone profiles between ozone lidar and ozonesonde was displayed. Results show that the influence of the geometrical factor is reduced greatly in the lidar system. Atmospheric ozone profiles from 0.2 km to 2 km can be provided reliably by the lidar system.