Abstract: To evaluate the jitter of the Thirty Meter Telescope tertiary mirror, the acceleration signal collected from the tertiary mirror should be integrated into displacement signal and to be analyzed. The first and foremost, the acceleration of the mirror along the normal line was achieved. Then, the trapezoidal, Simpson, 3/8 Simpson numerical integration method were analyzed to show the basic property of the integration method; after that, using the transfer function and spectrum method, the jitter property of a large telescope at one meter scale was analyzed in both value and frequency domain and the jitter after adaptive optical adjustment was 6 m RMS. At the same time, this verifies the testing process plan for the jitter of the TMT M3. In this paper, the basic procedure for mirror jitter analysis was presented, and the conclusion can be draw that the method is adequate to fit the requirement proposed by TMT project. This work will give guidance to the jitter testing in the similar large aperture system.