Abstract:
In order to design one special filter with wide-refection, ZnS and Ag film was chosen as the layers based on the induced transmission filter. The ZnS layers were deposited by Ion Beam Assisted Deposition(IBAD) and treated using ion source deposition, and the Ag layer was deposited by magnetron sputtering. The rate of Ag film with different working parameter was discussed in this paper. At last, the best working parameters were chosen and deposited the induced transmission filter. The results indicate that it has over 90 percents of transmission from 750 nm to 850 nm and more than 90 percents of reflection from 2 500 nm, and the face-resistence is less than 300 . The filter has a good reflection infrared and anlistatig character.