Abstract: A novel surface passivation of InP, combined wet passivation to dry passivation was proposed. In this work, the density of surface state was decreased efficiently so the strong luminescence property was obtained. The stability of InP surface was confirmed, which was exposed in air some day. Photoluminescence (PL) was performed in room temperature to achieve intensity measures. The high-resolution X-ray photoelectron spectroscopy (XPS) for InP revealed that a In-S bonding was increased with the annealing treatment. The density of surface was decreased further. The surface morphology of the sample was reflected with atomic force microscopy (AFM).