Abstract:
Fabry-Perot etalon is a precision optical instrument. Due to its narrow spectrum and high fineness, it is widely used in measuring the fine distance, signal detection and analysis and so on. Therefore, the quick measurement and accurate calibration of parameters of Fabry-Perot etalon has become very important in numerous optical research and accurate calibration steps. To aim at the parameters measurement of the Fabry-Perot etalon, the experimental calibration scheme was designed and the narrow linewidth laser (linewidth1 kHz) was used. Moreover, the high-performance digital oscilloscope DPO4104B(1 GHz, 5 GS/s) was applied to directly test and calculate the parameters of etalon. This paper accurately calibrated the free spectral range, the full width at half maximum, the fineness, quality factor and the sweeping constant of the etalon. At last, two results of different schemes were compared. This paper can provide relevant technical reference for the fast and accurate parameters calibration of Fabry-Perot etalon.