Abstract: The effects of mixture gas ratio, gas pressure, charging voltage and output mirror reflectivity on laser pulse characteristics were studied. High energy was achieved when the ratio and output mirror reflectivity are 10:1 and 30%, respectively. The energy can be increased by raising charging voltage under the normal glow discharge condition, and there exists an optimum gas pressure for each voltage to obtain the highest energy. As for laser pulse width, it can be shortened by increasing mixture ratio and total gas pressure, while stretched by increasing charging voltage and output mirror reflectivity. Taking both laser energy and pulse width, the variation trend of laser peak power is similar with the output energy on the whole, but the parameters of mixture gas and output mirror which make the energy or the peak power reaching maximum are different.