Abstract: Based on the theory of the optical phased array (OPA) and behavior of the mode propagation in Ti-diffused Lithium Niobate (Ti_LiNbO3) waveguide, a novel array of integrated optical waveguides applied in OPA system was proposed. According to the beam propagation method (BPM) and the existing semiconductor technology and parameters, optical characteristics of the waveguide array, loss characteristics, and coupling characteristics were simulated. The structure of phased array parameters was presented. Simulation result shows that the OPA based on the array of integrated optical waveguides performs well. This array of integrated optical waveguides can steer consequently and precisely with the steering angle of more than 4.5. The half-wave voltage is less than 6 V, and the control unit has low loss and quick response.