离轴非球面镜检测中坐标系偏差对参数拟合的影响

Influence of coordinates deviation on parameter fitting in testing off-axis aspherics

  • 摘要: 光学装调前精确测量离轴非球面元件的顶点半径等参数是保证装调质量的关键。离轴非球面测量中,得到非球面坐标数据后,为了提高参数拟合的准确度,分析了测量坐标系偏差的影响。为了消除该偏差,提出了数据拟合模型和处理方法,并给出了详细的参数拟合的步骤。与直接拟合相比,该方法得到的误差平方和、均方根误差更小,决定系数更接近1,验证了拟合模型及处理方法的有效性。该方法适用于所有离轴非球面镜检测时坐标系的偏差分析和参数的拟合处理。

     

    Abstract: Accurate measurement of the vertex radius of off-axis aspheric mirrors is the key to guarantee the assembly and adjustment quality. During the tests of off-axis aspheric mirrors, the influence of coordinates deviation was analyzed in order to improve the precision of fitted results. A fitting model with the corresponding processing method was proposed so that the impact of coordinates deviation could be eliminated. Besides, the parameter fitting procedures were also presented. Compared with the classical direct fitting, presented method can achieve smaller Sum of Square Error and Root of Mean Squared Error while the coefficient of determination is much closer to 1. The experiment verifies the the proposed method's validity. Furthermore, this method is available to coordinates deviation analysis and parameter fitting process in all off-axis aspheric mirror tests.

     

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