基于泰伯莫尔法的长焦距测量系统的装调技术

Alignment method for measurement of long focal length based on Talbot-Moiré effect

  • 摘要: 为了实现长焦距的精确测量,基于泰伯莫尔法测量长焦距的原理,构建出了由准直波前发生器、泰伯干涉仪和成像采集系统组成的长焦距测量装置。分析了准直波前畸变对焦距测量精度的影响,用数值分析的方法分析了待测样品到光栅G1 的距离s,光栅G1、G2 的间距d 以及栅线夹角对焦距测量精度的影响。提出了具体的装调方法:用五棱镜法检测波前,保证准直波前质量PV 值优于一个波长;用光栅尺位移传感器测量s,标定d,使其精度达到0.1mm;采用标准反射凹球面法标定光栅夹角,使光栅夹角的装调精度达到0.001。对焦距为5436mm 的透镜进行实验测量,误差小于0.35%。

     

    Abstract: In order to achieve high-accuracy measurement of the long focal length, a method of measuring long focal length based on Talbot-Moireffect was studied in this paper, a long focal length test device was established, it included a collimated wavefront generator, a Talbot interferometer and a imaging system. The effect of wavefront aberration on accuracy of focal length was analyzed. Then the distance s from the sample to the grating G1, the space d between grating G1 and grating G2,and angle of two grating lines as influencing factors on accuracy of focal length were analysed. The alignment method to improve the accuracy was proposed. Pentaprism method for the detection of wavefront was introduced, to ensure that the collimated wavefront quality better than a wavelength. The linear grating encoder was used to measure s and calibrate d, to make the accuracy of the distance better than 0.1 mm. A reference reflective concave sphere was used for angle calibration, to make the accuracy of angle better than 0.001. The experimental results show that the relative error is less than 0.35% when measured focal length is 5436mm.

     

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