Abstract: In order to adapt the fast development of ultraviolet detection and fitting the requirements for the calibration of ultraviolet optical sources and ultraviolet detectors, a facility for calibration of ultraviolet and vacuum ultraviolet spectral irradiance was set up. The facility was composed of standard optical source (deuterium lamp), standard detector(intensive silicon diode), ultraviolet monochromator, vacuum chamber and so on. The double standards and compared method were adopted in the facility to calibrate the equipments. As well as the value of the standard detector and source were transferred to the detector and the source which were calibrated. Spectral range is 110-400 nm.The maximum uncertainty for calibrating the detector is 12%(k=2), and for the optical source is 20%(k=2).