Abstract: To improve optical micro scanning device position calibration precision of the micro thermal imaging system, a Fourier transform micro displacement detection method based on histogram statistical tension was proposed. It can improve image contrast and enhance image details according to histogram features of micro thermal imaging. And with the images enhanced by histogram statistical tension can increase displacement detection accuracy by Fourier transform. So it also can improve the scanning calibration position precision. The construct experiment of before and after images enhance were done. The experiment results show that with the method of histogram statistical tension the position calibration is more precise, the reconstructed image has higher quality and more abundant details.