用于红外光学窗口的多层保护膜

Multilayer protective coatings for IR optical windows

摘要: 采用GexC1-x（碳化锗）、BP（磷化硼）和-Si（非晶硅）作为高折射率材料，DLC（类金刚石）作为低折射率材料，在ZnS（硫化锌）、GaAs（砷化镓）、Ge（锗）等常用红外光学窗口表面研制了用于长波红外（8～12 m）波段的GexC1-x/DLC、BP/DLC及-Si/DLC系列多层保护膜。通过对比试验，研究了多层红外光学窗口保护膜的光学性能、显微硬度及海洋环境适应性。结合红外窗口及膜系材料特性，对试验结果进行了分析讨论。结果表明：GexC1-x/DLC多层红外保护膜具有最佳的光学性能，BP/DLC多层红外保护膜在海洋环境下具有最佳的保护效果。

Abstract: By using GexC1-x, BP and -Si as high index material and DLC as low index material, GexC1-x/DLC, BP/DLC and -Si/DLC multilayer protective coatings were designed and coated on long wave band IR windows such as ZnS, GaAs and Ge. Optical performance, micro-hardness and resistance to marine environment of these coatings were studied through experiments. Based on the characteristics of IR window and protective coating material, the results of experiments were discussed. The results show that GexC1-x/DLC multilayer coatings have best optical transmittance and BP/DLC multilayer coatings is best to resist marine environment.