Abstract: The optical wedge plays a guiding and key role on the processing of high-precision micro-hole drilling by laser pulses. In order to improve the laser micro-hole processing quality, a method was presented to improve the analysis on the impact of the optical wedge on accuracy of laser micro- manufacturing. First the concept of the equivalent of a single wedge vector was proposed. The double wedge vector model was established and analyzed based on the definition of a single wedge vector, and the new method of the vector superposition of the multiple wedges was came up with. Secondly, the simulation software was programmed by using Matlab. The simulation results show the trail of the laser pulses through the double optical wedge. The effect of the quality of the micro-hole caused by the un- synchronization of the motion system is investigated. The deviation quantitative analysis is carried and the formula of calculation the deviation is given. The conclusion is of great value to the performance indicators of designing the controlling system in the high-precision micro-hole drilling by laser pulses.