锰钴镍铜氧薄膜红外探测器制备与性能研究

Investigation on preparation method and performance of Mn_1.56Co_0.96-xNi_0.48Cu_xO₄ thin film IR detector

摘要: 报道了锰钴镍铜氧薄膜（Mn1.56Co0.96-xNi0.48CuxO4，MCNC，x=0，0.08，0.16，0.24）的红外探测器件的制备过程及器件性能。通过改变掺杂Cu的比例，制作了系列MCNC薄膜材料及红外探测器件。实验结果表明，对于一定厚度及尺寸的薄膜器件，铜的掺入能显著减小器件的阻值及器件噪声，弥补了负温度系数的减小的缺点。器件时间常数约为20~40ms。掺铜量为0.24的薄膜器件的探测率为0.83107cmHz1/2W-1，相比同样规格的锰钴镍器件提高了约130%。此外，对于MCNC薄膜器件的老化现象进行了初步探讨。

Abstract: The preparation procedure and performance of Mn1.56Co0.96-xNi0.48CuxO4 (MCNC, x=0, 0.08, 0.16, 0.24) IR detectors were reported. By varying the content of Cu ratio, a series of MCNC films and IR detectors were fabricated. The results show that the substitution of Cu element can significantly reduces the resistance and device noise for detectors with specific thickness and size. The typical time constant of the detector is 20-40 ms. The MCNC IR detector with x=0.24 shows a detectivity (D*) of about 0.83107 cmHz1/2W-1, which is enhanced by about 130% in comparing to the x=0.00 one. Additionally, the ageing phenomenon of MCNC detector is discussed in general.