孙玉洁, 段俊萍, 王雄师, 张斌珍. 多孔耦合型太赫兹波导定向耦合器的设计[J]. 红外与激光工程, 2017, 46(1): 125002-0125002(7). DOI: 10.3788/IRLA201746.0125002
引用本文: 孙玉洁, 段俊萍, 王雄师, 张斌珍. 多孔耦合型太赫兹波导定向耦合器的设计[J]. 红外与激光工程, 2017, 46(1): 125002-0125002(7). DOI: 10.3788/IRLA201746.0125002
Sun Yujie, Duan Junping, Wang Xiongshi, Zhang Binzhen. Design of multi-hole terahertz waveguide directional couplers[J]. Infrared and Laser Engineering, 2017, 46(1): 125002-0125002(7). DOI: 10.3788/IRLA201746.0125002
Citation: Sun Yujie, Duan Junping, Wang Xiongshi, Zhang Binzhen. Design of multi-hole terahertz waveguide directional couplers[J]. Infrared and Laser Engineering, 2017, 46(1): 125002-0125002(7). DOI: 10.3788/IRLA201746.0125002

多孔耦合型太赫兹波导定向耦合器的设计

Design of multi-hole terahertz waveguide directional couplers

  • 摘要: 设计了一种结构紧凑、工作频带较宽、耦合平稳、高方向性的十字形多孔耦合的太赫兹波导定向耦合器。基于多孔耦合原理,利用HFSS软件对太赫兹波导定向耦合器进行了模型仿真和结构优化。仿真结果表明:在325~475 GHz带宽范围内,该多孔耦合太赫兹波导定向耦合器耦合度达到7.50.8 dB,隔离度达到30 dB,即方向性优于20 dB,各端口回波损耗小于-20 dB。通过对该波导定向耦合器进行高温高压模拟仿真,确定了使用负性光刻胶SU-8作为结构材料的可行性,提出应用MEMS工艺在硅衬底上进行加工,将牺牲层工艺应用到波导腔结构的制作中。利用光刻在直通波导和耦合波导公共宽壁上形成的十字形等间距排列耦合孔结构,可以实现较宽的带宽和良好的耦合平坦度。该方法提高了耦合孔尺寸和位置的精度,减小了反射损耗,为太赫兹波导结构的加工提供了新思路。

     

    Abstract: A cross-shaped multi-hole terahertz waveguide directional coupler was designed. This compact structure has a large frequency band, stable coupling value and high directivity. The terahertz waveguide directional coupler structure was simulated and optimized with professional electromagnetic simulation software high-frequency structure simulator(HFSS) based on multi-hole coupling principle. The results show that the coupling degree of the terahertz waveguide directional coupler is 7.50.8 dB, the isolation is 30 dB, that is, the directivity is higher than 20 dB, and the return loss of each port is less than -20 dB in the range of 325 GHz to 475 GHz. Through high temperature and pressure simulation of the waveguide directional coupler, negative photoresist SU-8 is considered as a suitable material for structure fabrication. The directional coupler is fabricated by micro-electro-mechanical system(MEMS) technology, at the same time, sacrifice layer technology is applied to form the waveguide cavity structure. The uniformly-spaced coupling holes on the common wall of straight waveguide and coupling waveguide can be achieved by photolithography, therefore a wider bandwidth and a good coupling flatness of the directional coupler were obtained. This method improves the accuracy of the size and position of the coupling holes, reduces the reflection loss, and thus provides a new idea for the processing of terahertz waveguide structures.

     

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