Setup, simulation and experiment of uniform DLC film deposited by PLD on large hemispherical substrate

Since plasma generated by laser ablating takes on the distribution of Gauss form, it's difficult to gain uniform films on the large substrate especially on the hemispherical substrate by the method of pulsed laser deposition technology, which badly limits the actual application of this technology. Setup that could rotate at constant velocity along with swinging at variable velocity was designed. The films could be deposited continuously on different area of hemispherical substrate by using of this setup, which made sure the uniformity of the film. And the math model for distribution of the thickness was founded. Uniform diamond-like carbon film on large hemispherical substrate with 200 mm diameter was deposited by the setup based on the model simulation. The thickness asymmetry of the film was less than 5% in the range of 80. Large area homogeneous diamond-like carbon film prepared on hemispherical substrate by pulsed laser deposition method has great application foreground in some especial flied like space detection, and this setup can extend to deposit other films.