Multi-parameter measurement method based on combined surface reference

In order to solve the problems of complicated process, bulky and expensive apparatuses in multi-dimensional position detection of a moving body, an optical non-contact measurement method of simultaneously measuring four parameters of a moving object was proposed. The system consisted of a combined surface reference composed of a rotating paraboloid and a plane, and an optical probe. Based on the principle of plane mirror reflection and the features of combined surface reference, the angle measurement models of the pitch angle, the yaw angle and the two-dimensional displacements of the moving object were established respectively, and the accuracy evaluation and the repeatability experiments of the system were completed. The experimental results show that the angle accuracy of the system is 1.5, and the displacement accuracy is 1 m, laying a foundation for the error identification of machine tools.