Design and simulation of fast steering mirrors connected by universal flexure hinges

In high energy laser weapon systems, as core devices of beam steering control, fast steering mirrors play a key role in improving damage efficiency. In order to enhance the optical direction range in high energy laser weapon system, a fast steering mirror connected by a universal flexure hinge was designed. The influence factor of each component unit in the fast steering mirror was studied, and the feasibility of a mirror driven by every single voice coil actuator in every single degree of freedom was analyzed. On this foundation, the design basis of the voice coil actuator and the optical grating micrometer was proposed, and the parameters were designed, the flexibility expression equation of the fast steering mirror connected by a universal flexure hinge was deduced, then the bending strength of the universal flexure hinge was verified. The results show that the movement stroke can reach to 3.3nd the first resonance frequency can reach to 231.04 Hz in the fast steering mirror system, which satisfies the requirements of long stroke and high bandwidth.