Research progress of on-chip integrated optical sensing technology (Invited)

Optical sensing technology has been widely used because of its advantages of high precision, low delay and imaging. With the rapid development of information technology such as big data and Internet of things, the demand for miniaturization and portability of optical detection and inspection platform is becoming more and more urgent. In order to overcome the dependence on large-scale special equipment and improve the applicability of on-site rapid detection and light-load platform application scenarios, in recent years on-chip integrated optical sensing technology has attracted great attention. With the integration of optical source, optical sensing and photoelectric detection units, as well as the development of on-chip light dispersion technology, the on-chip integration of optical sensing signal extraction and photoelectric signal conversion can be effectively realized, which contributes to the realization of the miniaturization and multi-functional integration. The relevant technical principles and technology development status were introduced, the pros and cons of the existing techniques were discussed, and the future development direction and application prospects were summarized.