Preparation of medium wave mercury cadmium telluride infrared polarization focal plane detector (Invited)

In order to meet the needs of accurately detecting and recognizing many kinds of high-value targets (such as stealth), the continuous development of detection technology, and realizing high probability true or false target recognition and high precision target detection, location and tracking in complex battlefield environment, it is of great significance to research stealth and weak feature target detection and anti-jamming detection in complex battlefield environment, the high integration of polarization focal plane infrared detector technology is one of the important direction. Focusing on the development of an integrated MW 256×256 HgCdTe polarization focal plane infrared detector, the research progress from the integration of polarization detectors to design and preparation of polarization structures were introduced, as well as the performance testing of polarization detector. A subwavelength metal grating array was designed and fabricated, the polarization detector was integrated by flip chip, and the infrared polarization performance was tested and evaluated on MW256×256 HgCdTe focal plane device.