Interferometric testing of convex freeform surface in industrial lens based on Computer-Generated-Hologram (invited)

Industrial lens elements have small aperture, large quantity and high precision requirements. Using free-form surface on the convex surface of lens will lead to complex surface shape and large deviation, which poses a high challenge of surface testing. An interferometric testing based on CGH was proposed. By using the Zemax software, we optimized the optical design, established the model to analyze the influence by the calibrating errors of industrial lens, and proposed an interferometric testing scheme of industrial lens. An experiment by testing a freeform surface of industrial lens was provided to demonstrate the reliability of the model and scheme. The experimental results show that CGH can realize the full aperture interference testing of convex free-form surface industrial lens, and the testing result is 0.57 μm PV which meets the needs of lens testing and verifies the reliability of interferometry by comparing with profilometer.