Influence of laser conditioning effects on intrinsic damage property of high reflection film at 1064nm

Laser conditioning technique is an effective method to improve the laser induced damage threshold (LIDT) of the optical elements. In this paper, the influence of N-on-1, R-on-1 and raster scan laser conditioning techniques with sing and multi-steps of energy increments on the HfO2/SiO2 high reflection films at 1 064 nm were investigated. Moreover, the 1-on-1 test was adopted to evaluate the laser conditioning effects of different techniques. The results indicate that the damage probability data deviation, fitting tolerance and LIDT deviation of 1-on-1 curves were able to characterize the reproducibility of measurements. Also, it is found that the single step modes of N-on-1 are less effective on improving the laser resistance ability than multi-steps, while the slight differences are difficult to distinguish between the single steps or multi-steps modes due to the uncertainty and deviation of 1-on-1 tests. Furthermore, the successive increasing energy steps will only lead to the improvement of the nonzero damage threshold except the 0% damage threshold.