Automatic testing system for multi-channel MEMS accelerometers based on virtual instrument technique

A novel automatic testing and analyzing system with seven channels for MEMS accelerometers was introduced in this article. This system was designed with multi-function and high level of integration based on multi-channel and parallel configuration, leading to high-efficient testing and analyzing. Based on the conventional testing systems, the Labview-based top level application software in this system was used to realize manipulation of the electro-mechanical vibrator, temperature humidity chamber, the voltage bias and so on. Meanwhile, parameters such as sensitivity, linearity, repeatability, hysteresis behavior, temperature behavior and frequency behavior were able to be measured and exported as reports all in once. Normally, the efficiency of sensor testing could achieve 50 devices/h, much higher than traditional manual systems. Experimental results show that the system is built up with high accuracy, stability and reliability, with the testing error less than 2.5%. This prototype enables the cost reduction of MEMS sensors, thus the mass application in the domain of internet of things (IOT).