Nd:YAG laser feedback interference effects based PZT precision measurement technology and system

The piezoelectric ceramic plays an important role in the precision control system, but it lacks effective and precise measurement methods for its actual high frequency response in fast control system. The present methods of measuring characteristics of piezoelectric ceramics were summarized in this paper and their difficulties and shortages were also analyzed, the laser feedback interference principle based Nd: YAG microchip laser feedback interference measurement system was used to study the dynamic characteristics of piezoelectric ceramics. The displacement of two kinds of piezoelectric ceramics was measured with the drive frequency range from 100 Hz to 7 kHz, and the corresponding displacement scale was 7-34 nm. The accuracy could reach nanoscale, accurate measurement under higher drive frequency was also achieved. The method has very high measurement accuracy, and lower requirements on the measured object.