Large dimension wedge-resonator on silicon chip for gyro application

For the problem that core sensitive unit of integrated optic gyro is difficult to realize integration and high sensitivity, a program of fabricating silica wedge-resonator was proposed. Through the theoretical analysis, the ultimate resolution of the gyro caused by the photo-detector shot noise was proportional to the product of the diameter and the quality factor of the resonant cavity. Wedge cavity of 1.5 cm diameter and 22 wedge angle was produced by MEMS(micro-electromechanical systems) process; resonant cavities with different wedge angles were acquired by controlling the mask layer parameters; the relationship between mask layer parameters and wedge angles quality was discussed. Through the coupling test, the quality factor of the resonator is 2106, the theoretical sensitivity of 6 ()/h is achieved for the gyroscope based on the resonator fabricated.