Research and fabrication of infrared detector filter film

In order to satisfy the requirements of infrared detector that can penetrate in 1.064 m and 3-5 m double wave bands, be reflected in 1.2-2.8 m wave band, work in the harsh environmental condition and have high stability and reliability etc, the reasonable design of the coating was discussed. The reasonable coating design method that based on the design theory of film and used TFC software of coating design was chosen to optimize thin films structure. Infrared multi-wave bands filter film was deposited on sapphire crystal substrates by using the electron beam vacuum evaporation and the ion auxiliary deposition technology. Moreover, the optical, physical, chemical and mechanical characteristics of the film material were studied and analyzed. The multi-wave bands filter film was made successfully by means of continuous experiment and optimization of technical parameters. The film was tested and analyzed and the result satisfied the basis use requirements of the infrared detector.