Ultra-precision optical fabrication technology
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摘要: 为满足193 nm 投影光刻物镜对光学元件不同频段的精度要求，提出了一种将超光滑加工和高精度面形修正相结合的超高精度光学元件加工技术。分别介绍了微射流超光滑加工技术和离子束高精度面形修正技术的基本原理。在自行研制的微射流超光滑加工机床和购置的离子束加工机床上对一直径100 mm 的熔石英平面镜进行了超高精度加工，经两次超光滑和一次离子束迭代加工后其面形由初始的rms 值35.042 nm 改善到3.393 nm，中频粗糙度由rms 值0.389 nm 改善到0.309 nm，高频粗糙度rms 值由0.218 nm 改善到0.080 2 nm。最后采用功率谱密度函数对加工前后的光学元件表面质量进行了分析评价。结果表明：采用微射流超光滑加工技术和离子束加工技术相结合的加工方法可以全面提升光学元件的面形精度和中、高频粗糙度，通过合理的工艺优化完全能够获得满足193nm投影光刻物镜要求的超高精度光学元件。Abstract: In order to satisfy the precision in different frequency bands of the 193 nm projection lens, an ultra-precision optical fabrication technology was introduced, which includes ultra-smooth polishing and high-precision surface figuring. The mechanisms of micro fluid jet ultra-smooth surfaces polishing(MJP) and ion beam figuring (IBF) were introduced. To demonstrate the process, an 100 mm fused silica flat optical element was polished on the ultra-smooth polishing and IBF machine. Through two MJP and one IBF iteration, its surface figure accuracy root-mean-square (rms) is improved from initial 35.042 nm to final 3.393 nm, the intermediate frequency surface roughness root-mean-square (rms) is improved from initial 0.389 nm to final 0.303 nm, and the high frequency surface roughness root-mean-square (rms) is improved from initial 0.218 nm to final 0.0802 nm. At last, the surface quality of the lens before and after polishing was analyzed by power spectral density. The result shows that the surface figure accuracy and roughness of optical element could be all highly improved by MJP and IBF union, and the ultra-precision element of 193 nm projection lens will be realized through optimizing the technological parameters.
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Key words:
- optical fabrication /
- ultra-smooth /
- ion beam figuring /
- surface figure accuracy /
- surface roughness
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[1] Yang Zhi. Study on specification and analysis of frequency band errors in deterministic optical machining[D]. Changsha: National University of Defense Technology, 2008. (in Chinese) 杨智. 确定性光学加工频带误差的评价与分析方法研究[D]. 长沙: 国防科技大学, 2008. [2] [3] [4] Bennett J M, Shaffer J J, Shubano Y, et al. Float polishing of optical materials [J]. Appl Opt, 1987, 26(4): 696-703. [5] [6] Mori Y, Yamauchi K, Endo K. Elastic emission machining[J]. Precision Engineering, 1987, 9(3): 123-128. [7] [8] Shi Feng, Dai Yifan, Peng Xiaoqiang, et al. Magnetorheological finishing for high-precision optical surface [J]. Optics and Precision Engineering, 2009, 17(8): 1859-1864. (in Chinese) 石峰, 戴一帆, 彭小强, 等. 高精度光学表面磁流变修形[J]. 光学精密工程, 2009, 17(8): 1859-1864. [9] [10] Yang Li. Advanced Optics Fabrication Technology [M]. Beijing: Science Press, 2001. (in Chinese) 杨力. 先进光学制造技术[M]. 北京: 科学出版社, 2001. [11] [12] Deng Weijie, Zhang Feng, Zheng Ligong. Removal function model and experiment of edge effect[J]. Infrared and Laser Engineering, 2011, 40(9): 1743-1748. (in Chinese) 邓伟杰, 张峰, 郑立功. 边缘效应的去除函数模型及实验[J]. 红外与激光工程, 2011, 40(9): 1473-1478. [13] [14] Fhnle O W. Fluid jet polishing of optical surfaces[J]. Applied Optics, 1998, 37(28): 6671-6673. [15] [16] Shi Chunyan, Yuan Jiahu, Wu Fan, et al. Influence of standoff distance on material removal function in fluid jet polishing [J]. Infrared and Laser Engineering, 2011, 40(4): 685-689. (in Chinese) 施春燕, 袁家虎, 伍凡, 等. 喷射距离对射流抛光去除函数 的影响[J]. 红外与激光工程, 2011, 40(4): 685-689. [17] [18] Wang Junlin. A numerical control non-contact spray polishing head [P]. China: 200410011215.X, 2008-06-18. (in Chinese) 王君林. 一种数控抛光用非接触式喷液磨头[P]. 中国: 200410011215.X, 2008-6-18. [19] [20] Marcel D, Michael Z, Frank A, et al. Ion beam figuring (IBF) for high precision optics [C]//SPIE, 2010, 7591: 75910Y1-9. [21] [22] Dai Yifan, Zhou Li, Xie Xuhui, et al. Deterministic figuring in optical machining by ion beam [J]. Acta Optica Sinica, 2008, 28(6): 1131-1135. (in Chinese) 戴一帆, 周林, 谢旭辉, 等. 应用离子束进行光学镜面确定 性修形的实现[J]. 光学学报, 2008, 28(6): 1131-1135. [23] Li Yun, Xing Tingwen, Xu Jiajun, et al. Dwell time algorithm for the 3-axis ion beam figuring system [J]. Infrared and Laser Engineering, 2012, 41(5): 1300-1305. (in Chinese) 李云, 邢廷文, 许嘉俊, 等. 三轴离子束抛光抛光系统驻留 时间算法[J]. 红外与激光工程, 2012, 41(5): 1300-1305. -
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