[1]
|
Lei Lihua, Li Yuan, Cai Xiaoyu, et al. Measurement of large step structure with a speed-variable scanning technology[J]. Infrared and Laser Engineering, 2017, 46(7):0717003. (in Chinese) |
[2]
|
VLSI Standards Incorporated. Nanolattice pitch standard NLSM user's manual[K]. USA:VLSI Standards Incorporated, 2012:12-18. |
[3]
|
Lei L, Li Y, Fan G, et al. The measurement of nano dimension standard by laser focus sensor[J]. Sensors Actuators A Physical, 2013, 203(6):430-433. |
[4]
|
Lei L, Liu Y, Chen X, et al. Fast and accurate calibration of 1D and 2D gratings[J]. Advanced Materials Research, 2011, 317-319:2196-2203. |
[5]
|
Feng C, Kajima M, Gonda S, et al. Accurate measurement of orthogonality of equal-period, two-dimensional gratings by an interferometric method[J]. Metrologia, 2012, 49(3):236-244. |
[6]
|
Ma Q, Xi G C, Wang C, et al. Comprehensive two-dimensional separation for the analysis of alkylphenol ethoxylates employing hydrophilic interaction chromatography coupled with ion mobility-mass spectrometry[J]. International Journal of Mass Spectrometry, 2012, 315(4):31-39. |
[7]
|
Moeder M, Martin C, Schlosser D, et al. Separation of technical 4-nonylphenols and their biodegradation products by comprehensive two-dimensional gas chromatography coupled to time-of-flight mass spectrometry.[J]. Journal of Chromatography A, 2006, 1107(1):233-239. |
[8]
|
Li Y, Lei L, Gao J, et al. Research of the optical characterization method on the nano dimension standard sample[J]. Micronanoelectronic Technology, 2012, 49(6):406-412. |
[9]
|
Weckenmann A, Peggs G, Hoffmann J. Probing systems for dimensional micro-and nano-metrology[J]. Measurement Science Technology, 2006, 17(3):504-509. |
[10]
|
Manske E, Jager G, Hausotte T, et al. Recent developments and challenges of nanopositioning and nanomeasuring technology[J]. Measurement Science Technology, 2012, 23(7):074001. |
[11]
|
Tibrewala A, Hofmann N, Phataralaoha A, et al. Development of 3D force sensors for nanopositioning and nanomeasuring machine[J]. Sensors, 2009, 9(5):3228-3239. |
[12]
|
Manske E, Jager G, Hausotte T, et al. Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas[C]//SPIE, 2011, 8082:808203. |
[13]
|
Muhammad H B, Oddo C M, Beccai L, et al. Development of a biomimetic MEMS based capacitive tactile sensor[J]. Procedia Chemistry, 2009, 1(1):124-127. |
[14]
|
Wuhrer M, Koeleman C A, Deelder A M. Two-dimensional HPLC separation with reverse-phase-nano-LC-MS/MS for the characterization of glycan pools after labeling with 2-aminobenzamide[J]. Methods in Molecular Biology, 2009, 534:79-91. |
[15]
|
Hausotte T, Percle B, Gerhardt U, et al. Interference signal demodulation for nanopositioning and nanomeasuring machines[J]. Measurement Science Technology, 2012, 23(7):074004. |