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所用样品为中国科学院上海技术物理研究所研制的高光谱用碲镉汞短波红外探测器,响应波段为1.0~2.5 μm, 规格为2 000×256,中心距为30 μm×60 μm,由512×256器件拼接而成,其中,2 000方向为空间维,256方向为光谱维,器件示意图如图1所示。由于探测器是由四个不同的探测器拼接而成,光谱维上的探测器的光谱响应一致性对高光谱成像应用显得尤为重要。实验中对四个512×256探测器模块进行了绝对光谱响应的测量,滤光片选用瑞典Spectrongon公司的五个型号的窄带滤光片。
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测量红外探测器的光谱响应率一般有两种方法。一种方法是通过测量探测器的黑体响应率和相对光谱响应,通过公式(1)计算[16]:
$$ {{{R}}}\left({\lambda}\right)=\dfrac{{{R}}_{{b}{b}}\times {G}\left({\lambda }\right)}{{{\displaystyle\int }_{0}^{{\infty }}{G}\left({\lambda }\right)\times {{\varPhi }}_{{\lambda }}{{\rm{d}}}{\lambda }}\bigg/{{\displaystyle\int }_{0}^{{\infty }}{{\varPhi }}_{{\lambda }}{{\rm{d}}}{\lambda }}} $$ (1) 其中
$$ G(\lambda)=\frac{V_{s}(\lambda) \times G_{R}(\lambda)}{V_{S R}(\lambda)} $$ (2) 式中:R(λ)为探测器的单色响应率;λ为单色光的波长; Rbb为探测器的黑体响应率;Φλ为黑体的单色辐射功率;G(λ)为被测探测器的相对单色响应率;VSR(λ)和VS(λ)为参考探测器和被测探测器的输出信号;GR(λ)为参考探测器的相对单色响应率[16]。
另一种方法是测出响应波长范围内某一波长点上的绝对响应,再根据相对光谱响应推算到整个响应波长范围,某一波长点的获取比较难,一般用光谱宽度比较窄的带通滤光片让某一窄波段范围的光入射到探测器表面,近似为该光谱宽度中心波长点的绝对响应。文中试验采用第二种方法。
文中试验采用《红外焦平面阵列参数测试方法》(GB/T 17444)对探测器的相对光谱响应和窄带性能进行测试。
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相对光谱响应是红外探测器的重要特性之一,描述了探测器响应率与入射波长的相对关系。相对光谱响应测试一般采用傅里叶变换法和光栅分光法[17]。傅里叶变换法采用傅里叶变换红外光谱仪、前置放大器等组成的测试系统对红外器件的光谱响应进行测试。采用傅里叶变换法测量相对光谱响应时,探测器上接收的光信号是按傅里叶频率调制的信号,与动镜扫描速度和测量的波数相关,即便是通过仪器函数进行校正,由于FTIR光谱仪中的IR光源相当于具有一定温度范围的辐射体而非单一温度黑体,光源的光谱分布以及探测器在短波一侧的响应一般较低,仍然会造成探测器在短波方向的相对光谱响应测量误差。光栅分光法用一个宽谱光源经光栅分光产生波长连续变化的单色光,记录被测探测器对不同波长的响应[18]。这两种方法获得的光谱响应一般是探测器的相对光谱响应,是探测器对不同波长光的相对响应,典型的碲镉汞短波红外探测器的相对光谱响应如图2所示。由于衍射效率和高级次衍射,光栅元件的工作范围一般都比较窄,最长波长不超过最短波长的两倍,采用光栅分光法测量相对光谱响应时,测量器件的不同波段需要切换光栅,为了在不同波段有足够的信噪比,还有需要更换光源和标准探测器。文中试验采用光栅分光的方法测量相对光谱响应。
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探测器的相对光谱响应测量有明确的测试方法和标准,因此,探测器光谱响应率的关键在于窄带性能的准确测量。中国科学院上海技术物理研究所研制的高光谱用碲镉汞短波红外探测器的响应波段为1~2.5 μm。为了准确判断探测器的光谱特性,希望能在1~2.5 μm波段范围内选择几个波长点进行窄带性能测试、比较。滤光片选用瑞典Spectrongon公司的五个型号的窄带滤光片,如表1所示,如果能准确获得窄带响应,结合相对光谱响应曲线,则可以获得短波红外焦平面探测器的光谱响应率。表1中的半带宽(Full Width at Half Maximum, FWHM)指滤光片最高透过率的1/2处所对应的波长,左右波长相减得到;截止范围是指除了有效带宽以外,要求截止的波长范围;截止深度(Optical Density, OD)指截止带中允许能透过光的最大透过率大小,OD=−lg(TOD)。OD3表示透过率TOD低于0.001,OD4表示透过率TOD低于0.0001,OD5表示透过率TOD低于0.00001。
表 1 滤光片的性能参数
Table 1. Specification of the filter
Filter Center
wavelength/nmFWHM/
nmPeak
transmittanceBlocking
wavelength/nmOD 1# 1225 10 50% 190-3200 OD3 2# 1670 10 60% 200-3500 OD3 3# 2062 10 60% 190-3500 OD3 4# 2420 10 60% 190-3500 OD3 5# 2470 50 70% 100-30000 OD3 -
假设探测器的截止波长为2.6 μm,光敏元大小为30 μm×60 μm,测试杜瓦的F数为0.9,F数为探测器光敏面至冷光阑开口的距离与冷光阑开口孔径之比,读出电路的积分时间为4.4 ms,积分电容为65 fF,探测器的量子效率按0.7估算,滤光片的截止范围为190~3200 nm,截止深度OD3,根据黑体辐射出射度的计算公式可以估算探测器的输出信号。
$$ M_{q}=\int_{1}^{\lambda_{c}} \frac{2 \pi c}{\lambda^{4} \times\left({\rm e}^{\tfrac{h c}{\lambda k T}-1}\right)} {\rm{d}} \lambda $$ (3) 式中:Mq为探测器响应波段的黑体辐射出射度,定义为单位辐射表面积向半球空间发射的黑体辐射通量;c为真空中的光速;h为普朗克常数;T为黑体的温度;k为玻耳兹曼常数。
辐射到样品光敏元表面的光子数计算公式为:
$$ N_{q}=\frac{\eta_{0} \times t_{\text {int }} \times A_{d} \times M_{q}}{4 \times F^{2}+1} $$ (4) 式中:$ {N}_{q} $为辐射到样品光敏元表面的光子数;η0为测试时杜瓦窗口等引起的外量子效率;tint为积分时间; $ {A}_{d} $为光敏元面积。焦平面探测器的输出电压计算公式为:
$$ {V}_{\rm out}=\frac{{\eta }_{d}\times {N}_{q}\times q}{{C}_{\rm int}} \times k $$ (5) 式中:${V}_{\rm out}$为焦平面探测器的输出电压;$ {\eta }_{d} $为探测器的量子效率;$ {N}_{q} $为辐射到样品光敏元表面的光子数;q为基本电荷;${C}_{\rm int}$为读出电路的积分电容;k为输出级增益。
由于滤光片带外截止不是完全截止,都有一定的透过率,因此估算了带外完全截止(理想滤光片)和OD3的带外截止深度的信号对比,以评估窄带滤光片带外截止对窄带性能测试的影响。表2为测试时冷屏上安装不同滤光片时,根据滤光片透过率曲线估算的探测器输出电压。
表 2 不同滤光片下的输出信号比较
Table 2. Comparison of output signal with different filters
Filter Blackbody temperature/℃ OD Wavelength range of integration/μm Photon number Output voltage/V 1# 140 - 1.22-1.23 35 6.02×10−5 OD3 1-2.60 2664 4.59×10−3 2# 140 - 1.665-1.675 328997 5.67×10−1 OD3 1-2.60 331610 5.71×10−1 3# 140 - 2.057-2.067 549490 9.47×10−1 OD3 1-2.60 552103 9.51×10−1 4# 80 - 2.415-2.425 311731 5.37×10−1 OD3 1-2.60 311890 5.37×10−1 5# 80 - 2.445-2.495 2233836 3.85 OD3 1-2.60 2234074 3.85 从表2的数据比较可以看出,在黑体温度为80 ℃下,4#和5#这两种滤光片带外截止深度OD3时对窄带性能测试影响很小。1#滤光片1~2.6 μm波段范围辐射到样品表面的光子数2664远远高于窄带带通范围1.22~1.23 μm范围的光子数35。这是由于黑体辐射的能量分布在短波方向比较少,OD3的滤光片在带外截止波段范围辐射到样品表面的光子数较多,图3为黑体辐射透过1#滤光片辐射到样品表面的光子数密度分布的理论计算结果。从图3可以看出,黑体温度为140 ℃的测试条件下,OD3滤光片的带外截止性能不能满足短波1.225 μm的窄带测试性能,目前市面上难于获得黑体温度高于140 ℃的黑体,如果滤光片的截止深度可以做到更低或者增加短波窄带滤光片的半带宽,可以更好地抑制带外截止的辐射影响。
图 3 黑体辐射透过1#滤光片到样品表面的光子通量密度分布
Figure 3. Distribution of blackbody radiation photon flux density on 1# filter
图4为黑体辐射透过5#滤光片到样品表面的光子通量密度分布的理论计算结果。从图4可以看出,黑体温度为80 ℃的测试条件下,5#滤光片的带外产生的光子数远远小于带内波段的光子数,可以用于准确测量窄带信号。
图 4 黑体辐射透过5#滤光片到样品表面的光子通量密度分布
Figure 4. Distribution of blackbody radiation photon flux density on 5# filter
表3列出了黑体温度为140 ℃时,在1.2 μm附近估算的短波波段不同半带宽和不同截止深度的滤光片对窄带性能测试的准确性的影响。
表 3 不同带外截止深度和不同半带宽的滤光片输出信号比较
Table 3. Comparison of filter output signal with diffe-rent out-of-band ODs and FWHM
Center
wavelength/nmFWHM/
nmOD Wavelength
range of
integration/μmPhoton
numberOutput
voltage/V1225 10 - 1.22-1.23 35 6.02×10−5 OD3 1-2.60 2664 4.59×10−3 OD6 1-2.60 38 6.50×10−5 1225 50 - 1.20-1.25 181 3.11×10−4 OD3 1-2.60 2804 4.83×10−3 OD5 1-2.60 211 3.63×10−4 1250 100 - 1.20-1.3 646 1.11×10−3 OD3 1-2.60 3271 5.64×10−3 OD5 1-2.60 672 1.16×10−3 1300 200 - 1.20-1.4 4253 7.33×10−3 OD3 1-2.60 6875 1.18×10−2 OD4 1-2.60 4514 7.78×10−3 OD5 1-2.60 4277 7.37×10−3 从表3中的数据可以看出,滤光片的半带宽增加到200 nm,带外截止深度达到OD5的情况下,才可以忽略带外的黑体辐射对带内的窄带性能测试的影响。市面上短波窄带滤光片既要有较大范围的带外截止,而且截止深度达到OD5的水平,滤光片难获得,而且价格比较昂贵。
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根据前面的分析,短波红外焦平面探测器用5#滤光片,即中心波长为2.47 μm、半带宽为50 nm、截止深度OD3的窄带滤光片可以准确测量窄带性能,5#滤光片的透过率曲线如图5所示,同时,2.5 μm附近的窄带响应是系统应用比较关注的性能。因此,测量2.47 μm处的窄带响应,根据该响应和相对光谱响应推算其他短波波段的光谱响应,这比直接测量短波1.2 μm的窄带性能可行性和准确性更高,探测器的相对光谱响应曲线短波方向误差比长波方向稍大,这也是在推算光谱响应率时造成误差的主要原因。为了解决这一问题,利用相对光谱响应经过标定的探测器对测试系统误差进行校准,采用该方法来获得被测探测器准确的相对光谱响应[19]。
根据《红外焦平面阵列参数测试方法》[20]对四个512×256探测器进行了相对光谱响应测试,波长的步进为50 nm,测试结果如图6所示,探测器相对光谱响应一致性非常好。同时对探测器的2.47 μm处50 nm半带宽的窄带响应率进行了测试,根据2.47 μm处的绝对光谱响应,结合相对光谱响应,按比例推算,得到探测器的光谱响应率。图7为四个探测器的光谱响应率曲线,从图7可以看出,原本相对光谱响应一致性非常好的四个探测器,其光谱响应率由于每个谱段的绝对响应差异而出现了分离,图8为计算的四个探测器光谱响应非均匀性,从图中可以看出,探测器在1 μm、1.9 μm和2.5 μm处的响应非均匀性分别为6.23%、6.06%、4.07%。相比传统的测量探测器相对光谱响应和黑体响应率的方法,采用光谱响应率可以更加准确地评价短波红外探测器的光谱响应特性,有利于探测器在高光谱成像中的合理应用。
Spectral responsivity of mosaic SWIR detectors
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摘要: 红外探测器的光谱响应一致性影响高光谱成像仪器的动态范围,研究高光谱成像用拼接型短波红外探测器在同一光谱维的响应均匀性对提高高光谱成像性能有重要意义。通过测量相对光谱响应和窄带响应,对响应波段为1.0~2.5 μm、规格为2000×256的碲镉汞短波红外探测器光谱响应率进行测量和分析,提出用光谱响应非均匀性定量化分析光谱响应一致性。分析了在80 ℃和140 ℃不同的黑体温度下,窄带滤光片的中心波长和半带宽不同时,带外截止深度为OD3时,带外信号对窄带性能测试误差的影响。通过测量探测器模块的光谱响应率,计算拼接的2000×256探测器在1 μm、1.9 μm和2.5 μm处的响应非均匀性分别为6.23%、6.06%和4.07%。光谱响应率的准确测量实现了拼接型短波红外探测器的光谱响应一致性的定量化评价,有利于探测器在高光谱成像中的合理应用。Abstract:
Objective Hyperspectral imaging can not only get the two-dimensional geometric spatial information of the observed objects, but also obtain the continuous high-resolution spectral information which can reflect the physical and chemical characteristics of the target. It is a very important method for target detection and recognition based on hyperspectral remote sensing information. Spectral range of typical imaging spectrometer is 0.4-2.5 µm due to the ground objects' reflection of solar radiation. Mercury Cadmium Telluride (Hg1-xCdxTe) detectors cover a bandwidth of 0.8-30 µm as the alloy composition of Hg1-xCdxTe material is tuned in terms of cut-off wavelength. Hg1-xCdxTe detectors are the major part of the imaging spectrometer for detection in short waveband. As the swath width of the imaging spectrometer increased, larger scale infrared focal plane array (IRFPA) is needed. Mosaic ultra-large scale shortwave infrared (SWIR) detectors can meet the demand for wide field of view detection in space application. The detector modules for butting have their own spectral responsivity. Hyperspectral imaging demands that the mosaic IRFPA has high uniformity of the spectral response. Therefore, it is necessary to measure and analyse the spectral responsivity specification of the mosaic IRFPA accurately and quantitatively for the hyperspectral imaging application. For this purpose, a method for evaluating the absolute spectral responsivity of the mosaic SWIR detectors is proposed in this paper. Methods This paper presents a method for measuring the absolute spectral responsivity accurately and quantitative analysis of the spectral responsivity specification of the mosaic 2 000×256 SWIR detector for imaging spectrometer. The relative response spectrum is measured by a precisely calibrated grating monochromator system. Five optical filters with different center wavelength (CW) and full width at half maximum (FWHM) were chosen to analyze and measure the narrow band responsivity (Tab.1). The center wavelength of the filter is 1225 nm, 1670 nm, 2062 nm, 2420 nm and 2470 nm respectively. The bandwidth is 10 nm and 50 nm, and the cut-off depth is OD3 (optical density). Spectral responsivity is calculated by relative response and narrow-band responsivity. Results and Discussions The cut-off wavelength of detector to be tested is 2.6 μm, and its pitch size is 30 μm×60 μm. The integration time of the read-out integrated circuit (ROIC) is 4.4 ms and integration capacity is 65 fF. F number of the Dewar is 0.9. The results of output signal analysis with filter of different CW at different black body temperature show that narrow-band responsivity is much lower than out-of-band response (Tab.2, Fig.3) with 1# filter and much higher (Tab.2, Fig.4) with 5# filter. The possibility of narrow-band signal's accurate measurement at 1200 nm is discussed if the bandwidth is widened to 200 nm and the cut-off depth is adapted to OD4 and OD5 (Tab.3). It shows that narrow band responsivity can be measured precisely only when cut-off depth is smaller than OD5 and FWHM is wider than 200 nm. Based on the result of the analysis, for HgCdTe SWIR detector the measurement error is smallest when the filter's center wavelength is 2470 nm, FWHM is 50 nm, and cut-off depth is OD3 at 80 ℃ black body temperature. The absolute spectral responsivity of four HgCdTe detectors is measured by the relative response curve and narrow-band responsivity (Fig.7). According to the spectral responsivity curve, the responsivity non-uniformity of four detectors can be calculated to be 6.23%, 6.06%, 4.07% at 1 μm, 1.9 μm and 2.5 μm respectively (Fig.8). Conclusions In this study, a quantitative method for measuring the spectral responsivity accurately and analyzing the spectral responsivity specification of the mosaic 2000×256 SWIR detector for imaging spectrometer is proposed. The results of this study demonstrated that spectral responsivity of Hg1-xCdxTe SWIR can be measured accurately when the filter's center wavelength is 2470 nm, FWHM is 50 nm, and cut-off depth is OD3 at 80 ℃ black body temperature. Narrow-band spectral response output signal is much larger than signal caused by out-of-band response. The spectral responsivity non-uniformity of the four detectors helps to evaluate the response uniformity of spectral dimension response of 2000×256 SWIR detector quantitatively. The results have demonstrated that the use of this measuring method promotes appropriate application of IRFPA detectors in hyperspectral imaging. -
Key words:
- hyperspectral imaging /
- spectral responsivity /
- quantitative analysis /
- SWIR detector /
- Hg1-xCdxTe
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表 1 滤光片的性能参数
Table 1. Specification of the filter
Filter Center
wavelength/nmFWHM/
nmPeak
transmittanceBlocking
wavelength/nmOD 1# 1225 10 50% 190-3200 OD3 2# 1670 10 60% 200-3500 OD3 3# 2062 10 60% 190-3500 OD3 4# 2420 10 60% 190-3500 OD3 5# 2470 50 70% 100-30000 OD3 表 2 不同滤光片下的输出信号比较
Table 2. Comparison of output signal with different filters
Filter Blackbody temperature/℃ OD Wavelength range of integration/μm Photon number Output voltage/V 1# 140 - 1.22-1.23 35 6.02×10−5 OD3 1-2.60 2664 4.59×10−3 2# 140 - 1.665-1.675 328997 5.67×10−1 OD3 1-2.60 331610 5.71×10−1 3# 140 - 2.057-2.067 549490 9.47×10−1 OD3 1-2.60 552103 9.51×10−1 4# 80 - 2.415-2.425 311731 5.37×10−1 OD3 1-2.60 311890 5.37×10−1 5# 80 - 2.445-2.495 2233836 3.85 OD3 1-2.60 2234074 3.85 表 3 不同带外截止深度和不同半带宽的滤光片输出信号比较
Table 3. Comparison of filter output signal with diffe-rent out-of-band ODs and FWHM
Center
wavelength/nmFWHM/
nmOD Wavelength
range of
integration/μmPhoton
numberOutput
voltage/V1225 10 - 1.22-1.23 35 6.02×10−5 OD3 1-2.60 2664 4.59×10−3 OD6 1-2.60 38 6.50×10−5 1225 50 - 1.20-1.25 181 3.11×10−4 OD3 1-2.60 2804 4.83×10−3 OD5 1-2.60 211 3.63×10−4 1250 100 - 1.20-1.3 646 1.11×10−3 OD3 1-2.60 3271 5.64×10−3 OD5 1-2.60 672 1.16×10−3 1300 200 - 1.20-1.4 4253 7.33×10−3 OD3 1-2.60 6875 1.18×10−2 OD4 1-2.60 4514 7.78×10−3 OD5 1-2.60 4277 7.37×10−3 -
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