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量子信息科学开启了超越经典物理极限的契机，从而产生了量子计算、量子通信与量子精密测量等前沿技术领域[1-6]。其中，量子计算技术可以使计算机的运算速度相较于经典计算机呈指数级加速，量子通信技术保证了通信的高度甚至绝对安全[7-9]，而量子精密测量技术可以极大地优化许多器件或设备的灵敏度与分辨率[10-11]。这些潜在的先进特征将推动量子信息技术在各个领域的创新发展，而未来的发展趋势是将量子计算、量子通信和量子精密测量等系统连成一体，即构建量子信息系统和量子网络[12-13]，使量子科技在下一代信息技术领域占据主导地位。
要实现实用化的量子信息系统和量子网络，首先必须开发高性能的基础器件。例如，超导量子回路的研制催生127位量子计算机的成功[14]，而实现更通用的量子计算机仍然需要更大规模、更鲁棒、更量子化的量子逻辑电路芯片，它可能由超导体[15]，也可能由冷原子[16]、半导体[17]、光子晶体[18]等所组成。建立量子网络的关键技术之一在于物理尺度上彼此相距较远的节点之间纠缠量子比特的高效分发，这就需要用高性能的量子纠缠光源和量子存储器来实现[19]。在各种类型的量子器件中，光电器件在量子信息技术发展中发挥着关键和核心作用。先进的微电子、光学和光电子平台能够制造大多数量子信息处理系统的基础器件[20]。光电技术无疑在过去的十数年为量子科技的发展提供了有力的支撑，将来还有可能在量子信息领域构建完整的产品链[21]。
目前，相当多的光电材料如非线性光学晶体[22]、半导体[17]、量子点[23]、光子晶体[18]、金刚石[24]、二维材料[25]、钙钛矿[26]、超材料[27]等，已被用于各种量子器件，如量子计算逻辑门、量子光源、单光子探测器、量子存储器、量子信道、量子传感器等的设计和制备。笔者团队也正是以各种光电材料为平台，在量子器件领域进行了一系列探索、研究和开发。毫无疑问，量子信息科技的实用化仍然有赖于各类量子器件的进一步发展，例如需要大幅改善光电过程的相干性、增强量子芯片的鲁棒性、提高量子信息网络的可扩展性等。为了更好地面对新的挑战，笔者需要首先回顾一下以往的工作，总结研究经验，积累技术储备。
因此，文中将对笔者团队在光电量子器件方面的研究进展进行综述，具体在第1、2、3和4节分别介绍单光子源、纠缠光源、单光子探测器和其他器件方向的研究工作，希望对未来量子信息网络技术的发展有所裨益。
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单光子源是量子通信中的基本器件，并且在量子测量和量子计算中也有很好的应用。在这个方向上，笔者研究了量子点单光子源、宣布式单光子源和量子随机数发生器等。
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目前使用的单光子源大多是概率性器件[28]，不能很好地满足量子信息系统的要求。量子点被认为是按需发射的、确定性单光子源的理想候选者，因此，笔者深入研究和总结了基于量子点的单光子源[29]。在简单结构量子点单光子源[30-31]基础上，为了提高产率和全同性，以及兼容石英光纤量子通信系统，笔者利用腔体Purcell效应调制量子点寿命，设计了Si/SiO2分布式布拉格反射器（DBR）微柱腔与InP基半导体的异质混合集成结构[32]，又引入绝热渐变DBR层设计方法[33]，理论构建了高效、全同甚至高度相干的1.55 μm量子点单光子源。
考虑到以上异质集成工艺的难度和成本，笔者又设计了InP基的纳米柱型腔-量子点单光子源[34-36]。这一类柱型光腔由亚微米尺度的InP、空气隙和InGaAsP材料组成，如图1(a)所示，因此，可以使用monolithic工艺制造。图1(b)显示了计算出的不同结构参数下的光学能带和光学模式谱。结果表明，通过结合空气隙和渐变DBR结构，可以在1.55 μm波段实现104~105的高品质因子和GHz级比特率的高全同单光子产生，从而证明该纳米腔具有作为光纤量子通信用高效量子点单光子源的潜力。以上纳柱腔产生的两个光学模式(图1(b))在椭圆腔结构中可以满足偏振正交态的共振激发条件，从而实现高效率偏振单光子源[37]。上述使用绝热渐变技术的腔体设计后来扩展为一种通用方法，通过这种方法可以实现不同类型的高性能量子光源[38-39]。
为了推进以上量子点单光子源设计的实用化，笔者研究了制造公差对Si/SiO2-InP[40]和InGaAsP/InP-airgap[41]微纳柱形腔的影响。结果表明，微纳柱型光腔的品质对工艺缺陷具有鲁棒性。厚度误差在±2 nm内，直径不确定性在±2%内，表面粗糙度在±2.5 nm内，侧壁倾角为0.5°内时，仍然可以在1.55 µm波长处形成强耦合(相干)单光子源。因此，笔者设计的量子点-微纳柱型光腔结构，在实现石英光纤基量子信息网络方面具有很好的应用前景。
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上述量子点单光子源目前还未实用化，因此，人们必须寻找更便于实用的其它单光子按需发射方案。宣布式单光子源（HSPS）就是可能的候选者之一。它虽然是概率性的，但可以尽可能地接近确定性的要求。其原理是，关联光子对中其中一个光子被检测到时，同时指示了另一个光子的确定性存在。关联光子对的产生可以通过自发参量下转换或自发四波混频过程来实现，铌酸锂是满足该条件、实现量子光源器件的最好材料之一[42]。利用频分复用和有源前馈频谱处理技术，最近，笔者提出和制备了一种绝缘体上薄膜铌酸锂（LNOI）结构的1.5 μm宣布式单光子源[43]，如图2所示。
基于该单光子源，笔者进行了相关实验和测试，如图3所示。实验结果显示，光子发射速率比同类研究提高了近三倍，特别是，该单光子源呈现出极低的二阶相关系数g2(0) = 0.0006 ± 0.0001（这是一项1.5 μm单光子纯度的记录）。此外，通过对这些频分复用的单光子和来自独立弱相干源的光子进行Hong-Ou-Mandel （HOM）干涉试验，证明了频分复用宣布式单光子有很高的全同性[44]，这为实现高度确定性的、可扩展的、高性能单光子源建立了可靠途径。
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量子随机数发生器是单光子源的一个重要验证，它利用量子系统的固有随机性生成真实的和不可预测的量子态信号，在量子信息处理领域有着广泛的应用。
笔者的一项工作，是在室温下实现了蓝宝石衬底上氮化镓薄膜中单个缺陷的高质量单光子产生[45]，产生速率为2 MHz，自相关系数为0.36±0.01。利用此单光子源，笔者对实时量子随机数发生过程进行了实验验证，如图4所示。实验中，笔者使用532 nm连续激光器对GaN单光子源进行泵浦，采用截止波长为560 nm的二色镜将激光束通过数值孔径为0.9的物镜反射聚焦到氮化镓晶片上。单光子源发出的信号由共聚焦物镜收集，然后通过二色镜定向到Hanbury-Brown（HB）光路系统进行检测。对以上构建的量子随机数发生器的测试结果表明，它可以在室温下实现1.8 MHz的初始比特生成率，且在冯·诺伊曼随机提取过程中可获得420 kHz的无偏比特生成率。这项研究证明了商用氮化镓晶圆在高速量子随机数发生器集成研制方面具有很好的应用前景。
图 4 量子随机数发生器方案。(a) 实验系统，使用自制的共聚焦扫描显微镜等元件完成GaN激励并产生单光子；(b) HBT光路，用于评估发射的单光子的纯度并生成量子随机数[45]
Figure 4. Scheme of a random bit generator with branching paths. (a) Experimental setup, which involved a self-made confocal scanning microscope to stimulate the single photon emitting in the GaN wafer and capture the luminescence from individual photons; (b) HBT configuration, employed to assess the purity of single photons emitted and generate binary random numbers[45]
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量子纠缠光源是量子信息系统中的核心关键器件[46-48]。笔者团队近年针对量子纠缠光源的性能优化、集成化以及应用等进行了多方面的研究。
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光子作为信息的载体，可以在不同自由度上进行纠缠，如偏振、频域、时间-能量、轨道角动量、时域等。为了获得高性能的离散频域纠缠光子对，笔者提出并演示了一种通过单片PPLN波导改进Sagnac干涉光路的方案[49]。基于二次谐波产生（SHG）-自发参量下转换（SPDC）级联过程，在Sagnac干涉环路的不同方向上制备了关联双光子态。泵浦激光偏振态的改变可以引入两条传输路径之间的相对相位差，从而调控输出双光子态。然后利用光纤偏振分束器，无需后选择可得到离散的频率片纠缠光子对，如图5所示。纠缠光子对的量子拍可见度为96.0%±6.1%，频率片纠缠保真度达到98.0%±3.0%，为量子信息处理提供了一种与现代光通信系统兼容的实用型纠缠光源方案。
为了获得更高性能的纠缠光源，笔者提出一种光纤集成PPLN波导模块方案[50]， 在单片PPLN波导中实施SHG-SPDC级联过程，光纤输出了高质量的关联光子对。图6显示了该方案的内部结构以及测量得到的光子关联特性和拉曼噪声特性。结果表明，光子对的符合与偶然符合计数比（CAR）最大值达到52 600，产生率和有效计数率分别为52.36 kHz和3.51 kHz。相比于同类纠缠光源报导结果，它在光子关联性能上提高了近一个数量级。
图 6 单片PPLN波导级联产生纠缠光子的方案 。(a) PPLN波导模块的结构；(b) 该模块产生的相关光子对的光谱；(c) 共极化拉曼光子光谱；(d) 交叉极化拉曼光子光谱[50]
Figure 6. Cascaded photon entanglement using a single PPLN waveguide. (a) Structure of the PPLN waveguide module; (b) Spectra of correlated photon-pairs generated from the module; (c) and (d) Spectra of co- and cross-polarized Raman photons from the module[50]
基于关联光子对的相干叠加，笔者进一步扩展纠缠形成方法，制备了能量-时间、时间片和频率片纠缠光子对，如图7所示。能量-时间纠缠光子对的双光子干涉可见度为95.74%±0.86%，频率片纠缠光子对的保真度为97.56%±1.79%，空间量子拍的可见度达到96.85%±2.46%，时间片纠缠光子对的保真度为89.07%±4.35%。这一优化方案为量子信息处理提供了一种多自由度高性能的纠缠光子源，可以应对不同应用场景。
图 7 实现不同自由度纠缠的实验装置。(a) 关联光子对产生光路；(b) 关联光子对表征光路；(c) 能量-时间和时间片纠缠光子对表征光路；(d) 能量-时间纠缠光子对的相干操纵光路；(e) 频率片纠缠光子对的产生和表征光路[50]
Figure 7. Experimental setups for (a) Generation of correlated photon-pairs; (b) Characterization of correlated photon-pairs; (c) Characterization of energy-time and time-bin entangled photon-pairs; (d) Coherent manipulation of energy-time entangled photon-pairs; (e) Generation and characterization of frequency-bin entangled photon-pairs[50]
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未来量子信息处理系统需要集成量子芯片，为此，笔者提出了氮化硅(Si3N4)微环谐振器产生关联光子对的技术方案[51]，实验研制了基于Si3N4微环谐振器的量子纠缠光源[52]，其器件结构和表征结果如图8所示。可以看到，笔者将单个纠缠光源的空间压缩到了光子芯片的尺寸，而且将多个波长的功能集成到一个器件内。研究显示，微环谐振器的自由频谱范围为200 GHz，品质因子达到1.0×106，输出的能量-时间纠缠光子具有高保真高产率的特征。应用此纠缠光源，通过优化噪声抑制滤波等措施，进一步制备了芯片集成宣布式单光子源，其单光子纯度达到$ {g}_{h}^{0} $ (0)=0.014±0.001，Franson干涉可见度高达99.39%±0.45%。这种基于集成光子平台的多波长量子器件证明了芯片集成量子光源的技术可行性，有望成为未来量子网络中的重要器件。
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在前面工作的基础上，笔者进一步探讨了纠缠光源在量子信息处理技术中的应用验证，包括量子隐形传态和量子密钥分发（QKD）。
首先，利用上述工作所制备的量子纠缠光源，笔者进行了基于40 km长光纤卷的量子隐形传态试验[53]，结果表明传输速率和保真度分别为6.41±0.37 Hz和87.70%±5.75%。基于这一经验，笔者进一步通过校园骨干光纤网建立了一个三节点量子隐形传态系统[54]，如图9所示。在该系统中，笔者还构建了一个实时反馈回路来调节单光子的到达时间和偏振，这样可以保证分布在光纤通道中的光子的不可区分性，从而实现高效的贝尔态测量。最终，笔者在一个跨越64 km的光纤通道上成功地实现了量子隐形传态，量子态传输速率为7.1±0.4 Hz。此外，采用诱骗态技术，笔者还实现了90.6%±2.6%的单光子保真度。以上工作是量子互联网领域的重要进展，为固态量子纠缠光源在量子信息技术中的有效应用铺平了道路。
基于纠缠态的量子密钥分发（QKD）对于未来的量子安全通信网络非常重要，因为纠缠光子可以分发到远程节点上，并且不需要额外的量子随机数发生器。同时，开发与经典信道兼容的量子网络更具实用价值。因此，笔者的另一项纠缠源应用研究课题是，量子纠缠QKD与经典光通信的共存[55]。借助于密集波分复用技术，通过如图10所示的实验，笔者验证了，基于能量-时间纠缠的QKD与双向20 Gbps的经典光纤通信可以同时运行在至少40 km长的光纤通道上。在此基础上，采用BBM92协议实施QKD，笔者实现了245 bit/s的原始密钥生成率和8.88%的量子比特误码率。纠缠QKD/经典光纤通信兼容性的证实，展示了量子纠缠光源在未来量子信息网络中的巨大应用价值。
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作为量子计算的读出机构、量子通信的信号接收器和量子精密测量的光子分析设备，单光子探测器[56]在量子信息处理领域不可或缺。为此，笔者重点研究了单元/焦平面雪崩单光子探测器和负反馈雪崩单光子探测器，实现了单光子探测器在光纤传感系统中的应用。
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过去十年来，笔者团队在雪崩光电二极管（APD）的设计和制备方面做了不少研究工作，包括InGaAs线性模式APD阵列[57]，硅基高增益线列APD和小规模盖革模式APD阵列[58-59]，及多级倍增APD设计[60]等。以此为基础，近年，笔者进一步发展了用于量子探测的盖革模式APD，即单光子雪崩探测器（SPAD）。笔者首先优化了SPAD读出电路（ROIC）设计，提出了一种高速光子计数方法[61]。该读出电路采用主动淬灭和复位集成电路（AQR-IC）驱动InGaAs-SPAD，雪崩电压信号发送到FPGA系统以计算计数率，死时间也由FPGA调整，如图11所示。此ROIC最大光子计数率为15.6 MHz，死时间从64 ns到163.6 μs可调，时间分辨率为20 ns，提高了雪崩单光子探测的灵活性。运用此电路设计并结合低功耗固态制冷技术，笔者最近研制了一种低噪声自由运行InGaAs SPAD组件，其具有1.6 kHz的极低暗计数率和~10 MHz的高光子计数率。该SPAD组件已用于太阳光谱精密标定相关的量子测量设备。
除了SPAD器件的性能提升外，焦平面单光子探测器研制也取得了进展。笔者突破大面积高均匀低缺陷InGaAs/InP外延生长技术和局部杂质精确扩散技术，改善光刻、刻蚀、金属成膜等微纳工艺，精密设计和加工集成读出电路芯片，优化芯片倒装互连和TEC制冷封装工艺，提高了雪崩探测器制造工程的可靠性和良品率，降低了生产成本，研制成功了128×32规模InGaAs SPAD焦平面产品。图12显示，这一SPAD焦平面器件的光子探测效率（PDE）平均为25%，暗计数率（DCR）低于9 kHz，与国际先进水平[62]相当。该型SPAD组件已投入量子成像探测场景中以验证其工程化实用前景。此外，目前更大规模的InGaAs SPAD焦平面器件已初步完成试制。
图 12 典型128×32 InGaAs SPAD焦平面器件的 (a) PDE分布; (b) DCR分布测试结果
Figure 12. Measured (a) PDE; and (b) DCR of a newly fabricated 128×32 InGaAs SPAD array
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负反馈雪崩二极管（NFAD）[63]具有淬灭速度快、后脉冲小、易于集成等优点，可用于量子通信、荧光光谱检测、单光子计数成像等场景[64]，因此，NFAD器件及其单光子探测性能的研究具有重要的意义。在文献[65]中，笔者描述了NFAD新结构设计思想，并对近年来NFAD的发展和应用进行了总结。通过在SPAD之上单片集成薄膜电阻，人们构造了具有自被动淬灭功能的NFAD器件，改善了单光子雪崩器件的后脉冲性能，提高了用雪崩方式实现光子数可分辨探测的可能性。如能进一步将主动淬灭电路进行有机整合，由NFAD组成的单光子探测系统的性能将大大优于传统的SPAD器件，使单光子NFAD在量子信息处理中显示出独特的应用潜力。
为了进一步提升NFAD单光子探测性能，笔者提出了一种针对InGaAs NFAD的高精度低噪声自由运行读出电路[66]。该电路设计了一个超低噪声放大电路，其中噪声仅为~651 μVrms。电路采用数字编码对判别阈值电压进行控制，又与NFAD反馈电阻相结合，实现了大量程（4.5 ~90 V）高精度（150 µV）的高压功率输出。通过高速、大容量计数器对自由光子脉冲进行累计，使最小死时间缩短为20 ns，且直到 100 μs死时间可调。实验表明，该电路使NFAD的淬灭和恢复速度明显快于常规InGaAs SPAD，后脉冲效应也受到了极大抑制。这一工作为后续设计具有集成读出电路的NFAD单光子成像系统奠定了基础。
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单光子探测器不仅面向未来的量子信息系统[67]，也能实质性推进现有的测量技术向量子探测与传感水平发展。笔者前些年的一项成果是，在光纤时域反射仪中引入雪崩单光子探测器，大大提高了仪器的测距精度[68-69]。近来，通过采用超导纳米线单光子探测器，笔者展示了光纤布拉格光栅（FBG）传感器具有实现量子级测量的潜力[70]。该传感器将密集波分复用系统与1.5 µm单光子探测器进行了精密耦合，实现了5.0 cm的空间分辨率。单光子探测器与双波长差分检测技术（DWDD）的结合，在550 pm范围内实现了0.5 pm的波长测量精度。
考虑到高精度的FBG传感在时间和频谱域不能同时实现，笔者用DWDD方法研究了光谱展宽对光子计数FBG传感系统的影响[71]。同时笔者建立了理论模型，对不同空间分辨率下的单光子计数FBG传感过程进行了分析。图13为高空间分辨率DWDD的实验装置。其中宽带相干探测激光信号由锁模脉冲激光器产生后，被光耦合器（90:10）分成两部分。一部分由InGaAs光电探测器接收，为高分辨率时数转换器产生同步电子信号；另一部分光注入可调谐滤波器中，依次在中心波长1550.1 nm或1550.2 nm处产生不同谱宽的脉冲光。测试表明，该系统实现了DWDD测量仪光谱宽度0.6 nm、最佳空间分辨率3 mm、灵敏度2.03 nm−1，展示了单光子探测器对精密测量技术的有力支撑。
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量子器件是一个广阔的研究领域，除了上述器件外，笔者还在量子存储器、光机械量子器件和纳米光机电系统（NEMS）等方面进行了研究和探索。
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量子存储器是远距离量子中继架构的核心，也是量子网络的关键要素。在这一方向，笔者研究了基于掺杂稀土离子等固态材料的光量子存储技术[72]。掺铒光纤在光通信C波段表现出较强的光子-原子相互作用，因此，在温度10 mK的实验条件下，笔者在掺铒浓度200 ppm（1 ppm=10-6）的9.5 m光纤中成功地观察到了光学章动现象，证明了激光与铒离子系综之间的相干作用。实验还发现，在激光波长为1537 nm和磁场强度为0.2 T时，铒离子相关的跃迁偶极矩达到3.4 × 10−32 Cm，这为光纤基光量子存储准备了基础条件。
进一步地，笔者通过在掺铒光纤中使用原子频率梳量子存储协议，实现了光通信C波段光子的高带宽和多路量子存储[73]，如图14所示。该协议的主要优点是，可以同时存储的光子数量仅由时间带宽积决定。由于掺铒光纤具有明显的非均匀展宽和有限的均匀线宽，笔者所研制的光量子存储器具有5个以上频谱模式复用能力，其中每个模式带宽为10 GHz，时间模式数超过330个，为此，笔者实现了迄今为止最高的多模容量，即可在低温下同时存储1650个单光子。依此甚至可以预计，通过对实验方案进行改进，可以获得超过11500个光子的量子存储容量。这项工作为基于多路复用和宽带固态量子存储器的量子网络的实现奠定了技术基础。
与量子存储器的最终大规模应用相关，笔者还对过去二十年来在建立量子存储节点和最终构建全球量子网络系统方面的理论和实验的重大进展进行了总结[74]。该篇综述涵盖了在各种物理体系下，包括离子阱、冷原子系综、稀土掺杂固体和氮空位金刚石等，构建量子网络的可行方案及面临的挑战，对光电量子器件下一步发展方向有重要参考价值。
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光机械系统因其在设计、制造和控制方面的通用性，近年来在调制器、传感器、换能器等各种应用中显示出巨大的潜力，光电量子器件的发展无疑也是光机械系统展示功能的舞台。在此方向上，笔者以一维光子晶体结构为基础设计了一种新型的纳米梁光机械腔[75]，如图15（a）所示。这种纳米梁结构可以将光腔模式和机械谐振模式相干地耦合起来以呈现量子传感的功能。分析表明，优化纳米梁腔几何结构和调节微结构尺寸可以使光机械耦合系数突破0.01 MHz/nm，使光共振频率达到0.36 THz，为实现光机械量子传感奠定基础。
图 15 (a) 光机械纳米梁腔结构示意图；(b)和(c) 纳米梁腔中孔洞位置d及孔洞尺寸Δr示意图；(d) 光通信波段光学基模Ey分量分布图；(e) 基频呼吸模的位移场[76]
Figure 15. (a) Schematic diagram of the optomechanical nanobeam cavity; (b) and (c) Schematic representation of hole's position d and unitary variation of hole dimension Δr in nanobeam cavity; (d) Ey component of optical fundamental mode at telecom band; (e) Displacement field of the corresponding fundamental breathing modeing fundamental breathing mode[76]
跨自由度耦合无疑是量子器件的重要性质，而纠缠现象更是高端量子器件功能实现的核心关键。因此，笔者对以上纳米梁腔结构中光学和机械模式之间稳态纠缠的产生进行了研究[76]。图15(b)和(c)分别显示了SOI上纳米梁腔结构产生的通信波段光学基模Ey分量和对应的基频振动呼吸模的位移场，两者的场分布高度关联高度相似。模拟分析显示，红或蓝失谐光泵浦的情况下，光学基模和机械基模之间都可以形成有效的量子纠缠，纠缠度初步可以达到10−2数量级，而且纠缠对温度变化具有鲁棒性。
为了更深刻地理解和利用光子与机械振动的量子纠缠现象，笔者总结了近年来光机械量子器件有关的理论和实验进展[77]。通过分析电磁场与机械振子之间形成纠缠的原理和方法，梳理出了减轻热噪声等的影响、增强实验可行性和工艺适用性的各种技术方案。同时，笔者认识到，在常规环境例如室温、大气等条件下如何保持量子相干耦合、量子纠缠等特性，将是光机械量子器件研究面临的一个重大挑战。
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纳米光机电系统（NEMS）是一种新兴的混合杂化体系，它在纳米级尺度上集成了光学、电学和机械振动的功能，因此，近年来在多物理场耦合量子精密测量方面发挥了作用。笔者的一项相关工作是，制备石墨烯腔膜-硅空腔组成的NEMS器件结构，研究石墨烯振子、泵浦激光功率及系统电激励之间的关系[78]。笔者观察到，石墨烯腔膜的声子耗散随泵浦激光功率的增加而减小；当泵浦功率足够高时，声子被激励到一种强增益的状态。也即笔者实现了室温声子激射，为开发基于NEMS的微振动微质量量子传感器件提供了新的技术视角。
半导体硫代磷酸铬（CrPS4）是一种不同于石墨烯的二维反铁磁材料，笔者用它构建了与上述类似的NEMS器件[79]，如图16所示。运用激光干涉测量方法研究了少层CrPS4纳米振子的行为规律，结果显示出该器件在极高频率和栅极调控下有效工作的能力。更重要的是，通过分析受温度调节的谐振频率变化规律，笔者成功地检测到了CrPS4材料的磁性相变。这一成果验证了NEMS中机械振动与磁相位之间的相关性，为二维磁性材料谐振器在量子精密测量中发挥更大的作用奠定了基础。
NEMS不仅是量子传感的备选方案，更是一个长期受到普遍重视的技术领域，为此，笔者最近综述了NEMS研究的进展和成果[80]，深入探讨了NEMS中经典信息传导和量子信息处理之间的关联和区别，期待在量子科技领域内进一步扩展和增强NEMS技术的应用。
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为了在未来实现量子信息技术的大规模应用，笔者团队近年来研究探索了多种光电量子器件。作为光纤量子通信系统信号光源的解决方案，笔者设计了几种微纳柱型腔-量子点单光子源；运用光谱复用技术，实现了高纯度、高产率的宣布式单光子源；基于商用GaN材料缺陷的单光子特性，构建了室温工作的量子随机数发生器。在PPLN单波导中应用级联二阶非线性光学过程，笔者开发了一种量子纠缠光源，保真度为97%，噪声抑制水平提高近10倍；微纳加工制备Si3N4微环腔结构，实现了可见度超过99%的芯片集成式量子纠缠光源。笔者发展雪崩半导体器件工程技术，优化读出电路设计，研制了128×32及以上规模的SPAD焦平面组件，并用于量子探测实验。笔者制备了低温下可同时存储1650个单光子的光纤量子存储器；探索研究了有望用于量子探测/传感的光机械器件设计和NEMS器件制备方法。笔者团队面向各类量子光电器件的研究成果，是迈向量子科技实用化的一步，为未来构建量子信息网络提供了技术支撑。
Research progress of optoelectronic quantum devices (cover paper·invited)
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摘要: 量子科技的发展多年来得到了光电技术的有力支撑，笔者团队由此进行了一系列光电量子器件的研究和开发。为在光纤量子通信中实现单光子信号的按需产生，笔者设计了几种微纳柱型光腔-量子点单光子源；发展了频分复用技术，研制了高纯度、高全同的宣布式单光子源；利用GaN缺陷的单光子特性，制备了室温量子随机数发生器。笔者优化周期极化铌酸锂的级联波导结构设计，大幅提升了通信波段量子纠缠光源性能，使保真度高于97%，噪声特性提高10倍；设计和制备Si3N4微环腔纠缠源器件，实现了99%的干涉可见度，展示了芯片集成量子光源的技术可行性；应用所制备的纠缠光源，实现了数十千米光纤基量子密钥分发和量子隐形传态。笔者发展了单光子探测器制造工程，研制了用于太阳光谱量子测量的低噪声高速雪崩单光子探测器和用于量子成像的128×32及以上规模的雪崩焦平面单光子探测器。笔者制备了光纤基量子存储器，实现了1 650个光子模式的有效存储；研究了光机械量子器件的原理机制，探索了纳米光机电系统用于量子精密测量的技术前景。希望以上综述为未来量子信息网络的发展提供研究参考和技术储备。Abstract:
Significance Quantum information science has now attracted significant attention, since it has been well proved and is believed to support quantum computation, quantum communication and quantum metrology in the near future. Characteristics of quantum states have opened the opportunities to accomplish tasks beyond classical limits, resulting in a frontier field of quantum technologies. Among them, quantum computation technology can accelerate the speed of computers exponentially with respect to the classical machine. Quantum communication technology guarantees completely secure communication, and quantum measurement technology can greatly optimize the sensitivity and/or resolution of many instruments. These potential accomplishments have led to the development of innovative and advanced applications in various fields, and therefore people are presently struggling to construct efficient quantum information systems and quantum networks. To realize practical quantum information systems and quantum networks, fundamental devices must be firstly well developed. The successful fabrication of superconductor quantum circuit chips led to an achievement of constructing quantum computer consists of 127 qubits. Realization of more general quantum computers needs much larger scaled, more robust, more quantum logic circuit chip consisting of probably superconductors, cold atoms, semiconductors, photonic crystals etc. The primary obstacles in establishing a quantum network involve the distribution of entangled qubits among nodes that are physically distant from each other, which needs high-performance entangled photon source and quantum memory. Among various types of quantum devices, optoelectronic devices play a key and central role, since the advanced microelectronic, optical and optoelectronic platforms enable fabricating the building blocks for most of the quantum information processing systems. Technologies based on optoelectronics have the potential to realize a complete product chain in the field of quantum information. This work shows the study or fabrication of optoelectronic quantum devices including single photon sources, photon entanglers, single photon detectors, quantum memories and opto-electro-mechanical sensors. Progress Single photon emitters refer to the light sources that release light in the form of individual particles or photons. Single photon emitters are the fundamental devices for quantum communication. They are also well used in quantum detection and photonic quantum computation. In this direction, we have studied single photon emitters based on quantum dot (Fig.1), heralded single-photon sources (Fig.2-3), and a quantum random number generator (Fig.4). Quantum entanglement is a phenomenon that arises when a collection of particles is created, interact, or exist in close proximity to each other in such a manner that the individual quantum states of each particle cannot be figured out independently from the states of the others, even if these particles are widely separated. As a fundamental resource, quantum entangled light sources are widely used in quantum information processing. We have made a comprehensive study on the performance improvement (Fig.5-7), chip integration (Fig.8) and application (Fig.9-10) of entangled photon sources. A single photon detector is a photodetector which can respond to incident light signal as weak as one single photon. Single photon detectors play a widespread role in the field of quantum information processing since they serve as key devices for, e.g., readout in quantum computing, receiving in quantum communication and photon measurement in quantum metrology. This research is focused on specially designed single photon avalanche detectors (Fig.11), focal-plane single photon avalanche detectors (Fig.12), and negative feedback avalanche diodes (Fig.12). Moreover, we have proposed fiber Bragg grating sensing system by utilizing single photon detectors (Fig.13). In addition to the optoelectronic devices described above, we have also conducted abundant research on fiber-based quantum memory (Fig.14), optomechanical quantum device (Fig.15) and nano-opto-electro-mechanical system (Fig.16). All our studies will impact on the application of quantum technologies. Conclusions and Prospects In order to realize practical quantum systems in the future, our group have made efforts to create and investigate quantum devices by using optoelectronic techniques. QD-embedded nanocavities were designed to improve the efficiency of and to realize on-demand single photon emitters. Spectral multiplexing technique enabled the fabrication of a heralded single photon source with high purity and speed, approaching on-demand single photon emitting. A quantum random number generator working at room temperature was constructed based on single photon emitting from defects in commercial GaN material. Applying cascaded second-order nonlinear optical process in PPLN waveguides, we developed an entangled photon emitter with fidelity of 97% and noise level nearly 10 times better. Chip-integrated photon entangler with visibility of over 99% was established by fabricating Si3N4 micro-rings via micro/nano-processing. Readout circuits were optimized to help fabricating high quality SPAD devices, and SPAD focal plane devices were improved to 128×32 array for single photon and quantum imaging. A quantum memory was achieved to simultaneously store 1 650 single photons at low temperatures, and a few opto-electro-mechanical devices were experimentally tried to obtain quantum-level measurement ability for minor quantities. Our studies might be a step forward to the realization of practical quantum information networks. -
Key words:
- optoelectronics /
- quantum device /
- quantum information /
- single photon /
- quantum entanglement /
- quantum network
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图 4 量子随机数发生器方案。(a) 实验系统，使用自制的共聚焦扫描显微镜等元件完成GaN激励并产生单光子；(b) HBT光路，用于评估发射的单光子的纯度并生成量子随机数[45]
Figure 4. Scheme of a random bit generator with branching paths. (a) Experimental setup, which involved a self-made confocal scanning microscope to stimulate the single photon emitting in the GaN wafer and capture the luminescence from individual photons; (b) HBT configuration, employed to assess the purity of single photons emitted and generate binary random numbers[45]
图 6 单片PPLN波导级联产生纠缠光子的方案 。(a) PPLN波导模块的结构；(b) 该模块产生的相关光子对的光谱；(c) 共极化拉曼光子光谱；(d) 交叉极化拉曼光子光谱[50]
Figure 6. Cascaded photon entanglement using a single PPLN waveguide. (a) Structure of the PPLN waveguide module; (b) Spectra of correlated photon-pairs generated from the module; (c) and (d) Spectra of co- and cross-polarized Raman photons from the module[50]
图 7 实现不同自由度纠缠的实验装置。(a) 关联光子对产生光路；(b) 关联光子对表征光路；(c) 能量-时间和时间片纠缠光子对表征光路；(d) 能量-时间纠缠光子对的相干操纵光路；(e) 频率片纠缠光子对的产生和表征光路[50]
Figure 7. Experimental setups for (a) Generation of correlated photon-pairs; (b) Characterization of correlated photon-pairs; (c) Characterization of energy-time and time-bin entangled photon-pairs; (d) Coherent manipulation of energy-time entangled photon-pairs; (e) Generation and characterization of frequency-bin entangled photon-pairs[50]
图 12 典型128×32 InGaAs SPAD焦平面器件的 (a) PDE分布; (b) DCR分布测试结果
Figure 12. Measured (a) PDE; and (b) DCR of a newly fabricated 128×32 InGaAs SPAD array
图 15 (a) 光机械纳米梁腔结构示意图；(b)和(c) 纳米梁腔中孔洞位置d及孔洞尺寸Δr示意图；(d) 光通信波段光学基模Ey分量分布图；(e) 基频呼吸模的位移场[76]
Figure 15. (a) Schematic diagram of the optomechanical nanobeam cavity; (b) and (c) Schematic representation of hole's position d and unitary variation of hole dimension Δr in nanobeam cavity; (d) Ey component of optical fundamental mode at telecom band; (e) Displacement field of the corresponding fundamental breathing modeing fundamental breathing mode[76]
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[1] Bouwmeester D, Pan J W, Mattle K, et al. Experimental quantum teleportation [J]. Nature, 1997, 390(6660): 575-579. doi: 10.1038/37539 [2] O'brien J L. Optical quantum computing [J]. Science, 2007, 318(5856): 1567-1570. doi: 10.1126/science.1142892 [3] Pan J W, Gasparoni S, Ursin R, et al. Experimental entanglement purification of arbitrary unknown states [J]. Nature, 2003, 423(6938): 417-422. doi: 10.1038/nature01623 [4] Pan J W, Simon C, Brukner Č, et al. Entanglement purification for quantum communication [J]. Nature, 2001, 410(6832): 1067-1070. doi: 10.1038/35074041 [5] Yamamoto T, Koashi M, özdemir Ş K, et al. Experimental extraction of an entangled photon pair from two identically decohered pairs [J]. Nature, 2003, 421(6921): 343-346. doi: 10.1038/nature01358 [6] Yao X C, Wang T X, Chen H Z, et al. Experimental demonstration of topological error correction [J]. Nature, 2012, 482(7386): 489-494. doi: 10.1038/nature10770 [7] Gisin N, Ribordy G, Tittel W, et al. Quantum cryptography [J]. Reviews of Modern Physics, 2002, 74(1): 145-195. doi: 10.1103/RevModPhys.74.145 [8] Kasture S, Lenzini F, Haylock B, et al. Frequency conversion between UV and telecom wavelengths in a lithium niobate waveguide for quantum communication with Yb+ trapped ions [J]. Journal of Optics, 2016, 18(10): 104007. doi: 10.1088/2040-8978/18/10/104007 [9] Wengerowsky S, Joshi S K, Steinlechner F, et al. An entanglement-based wavelength-multiplexed quantum communication network [J]. Nature, 2018, 564(7735): 225-228. doi: 10.1038/s41586-018-0766-y [10] Boyer V, Marino A M, Pooser R C, et al. Entangled Images from Four-Wave Mixing [J]. Science, 2008, 321(5888): 544-547. doi: 10.1126/science.1158275 [11] Giovannetti V, Lloyd S, Maccone L. Advances in quantum metrology [J]. Nature Photonics, 2011, 5(4): 222-229. doi: 10.1038/nphoton.2011.35 [12] Kimble H J. The quantum internet [J]. Nature, 2008, 453(7198): 1023-1030. doi: 10.1038/nature07127 [13] Wehner S, Elkouss D, Hanson R. Quantum internet: A vision for the road ahead [J]. Science, 2018, 362(6412): eaam9288. doi: 10.1126/science.aam9288 [14] IBM. The IBM Quantum heavy hex lattice [EB/OL]. (2021-07-07) [2023-10-16] https://research.ibm.com/blog/heavy-hex-lattice. [15] Gambetta J M, Chow J M, Steffen M. Building logical qubits in a superconducting quantum computing system [J]. npj Quantum Information, 2017, 3: 2. doi: 10.1038/s41534-016-0004-0 [16] Beterov I I. Quantum computers based on cold atoms [J]. Optoelectronics, Instrumentation and Data Processing, 2020, 56: 317-324. doi: 10.3103/S8756699020040020 [17] Zhang X, Li H O, Cao G, et al. Semiconductor quantum computation [J]. National Science Review, 2019, 6(1): 32-54. doi: 10.1093/nsr/nwy153 [18] Azuma H. Quantum computation with Kerr-nonlinear photonic crystals [J]. Journal of Physics D: Applied Physics, 2008, 41(2): 025102. doi: 10.1088/0022-3727/41/2/025102 [19] Wolters J, Buser G, Horsley A, et al. Simple atomic quantum memory suitable for semiconductor quantum dot single photons [J]. Physical Review Letters, 2017, 119: 060502. doi: 10.1103/PhysRevLett.119.060502 [20] Lamata L. Quantum and optoelectronic devices, circuits and systems [J]. Electronics, 2023, 12(7): 1717. doi: 10.3390/electronics12071717 [21] Michaelis D E, Vasconcellos S, Gordon S, et al. Coherent control of a single exciton qubit by optoelectronic manipulation [J]. Nature Photonics, 2010, 4: 545-548. doi: 10.1038/nphoton.2010.124 [22] Kumar R, Ghosh J. Parametric down-conversion in PPLN ridge waveguide: a quantum analysis for efficient twin photons generation at 1550 nm [J]. Journal of Optics, 2018, 20(7): 075202. doi: 10.1088/2040-8986/aac7da [23] Cherie R K, Lee C B, Christopher B M, et al. Colloidal quantum dots as platforms for quantum information science [J]. Chemical reviews, 2021, 121(5): 3186-3233. doi: 10.1021/acs.chemrev.0c00831 [24] Wrachtrup J, Jelezko F. Processing quantum information in diamond [J]. Journal of Physics: Condensed Matter, 2006, 18(21): S807. doi: 10.1088/0953-8984/18/21/S08 [25] Liu X, Hersam M C. 2D materials for quantum information science [J]. Nature Reviews Materials, 2019, 4: 669-684. doi: 10.1038/s41578-019-0136-x [26] Cao Z L, Hu F R, Zhang C F, et al. Optical studies of semiconductor perovskite nanocrystals for classical optoelectronic applications and quantum information technologies: a review [J]. Advanced Photonics, 2020, 2(5): 054001. [27] Arne L G, Baptiste R, John M K, et al. Quantum metamaterial for broadband detection of single microwave photons [J]. Physical Review Applied, 2021, 15: 034074. doi: 10.1103/PhysRevApplied.15.034074 [28] Meyer-scott E, Silberhorn C, Migdall A. Single-photon sources: Approaching the ideal through multiplexing [J]. Review of Scientific Instruments, 2020, 91: 041101. doi: 10.1063/5.0003320 [29] Song H Z. The development of quantum emitters based on quantum dots, Chapter 3[M]//Quantum Dot Optoelectronic Devices, Switzerland: Springer Nature Switzerland AG, 2020. [30] Kimura S, Kumano H, Endo M, et al. Photon antibunching observed from an InAlAs single quantum dot [J]. Japanese Journal of Applied Physics, 2005, 44(6L): L793. doi: 10.1143/JJAP.44.L793 [31] Takemoto K, Nambu Y, Miyazawa T, et al. Transmission experiment of quantum keys over 50 km using high-performance quantum-dot single-photon source at 1.5 µm wavelength [J]. Applied Physics Express, 2010, 3(9): 092802. doi: 10.1143/APEX.3.092802 [32] Song H Z, Takemoto K, Miyazawa T, et al. Design of Si/SiO2 micropillar cavities for Purcell-enhanced single photon emission at 1.55 μm from InAs/InP quantum dots [J]. Optics Letters, 2013, 38: 3241. doi: 10.1364/OL.38.003241 [33] Song H Z, Takemoto K, Miyazawa T, et al. High quality-factor Si/SiO2-InP hybrid micropillar cavities with submicrometer diameter for 1.55-μm telecommunication band [J]. Optics Express, 2015, 23(12): 16264-16272. doi: 10.1364/OE.23.016264 [34] Song H Z, Hadi M, Zheng Y, et al. InGaAsP/InP nanocavity for single-photon source at 1.55-μm telecommunication band [J]. Nanoscale Research Letters, 2017, 12(1): 128. doi: 10.1186/s11671-017-1898-y [35] Xie X M, Xu Q, Shen B Z, et al. InGaAsP/InP micropillar cavities for 1.55 μm quantum-dot single photon sources[C]//Journal of Physics: Conference Series, 2017, 844(1): 012002. [36] Guo S J, Zheng Y Z, Weng Z, et al. InGaAsP/InP-air-aperture microcavities for single-photon sources at 1.55-μm telecommunication band[C]//Nanophotonics and Micro/Nano Optics III. 2016, 10027: 104-111. [37] Huang S, Xie X M, Xu Q, et al. Highly polarized InGaAsP/InP-Air-Gap elliptical micropillar cavity for single photon source at 1.55 µm communication band[C]//IEEE Xplore: 2020 IEEE 5th Optoelectronics Global Conference (OGC). 2020: 76-79. [38] Song H Z, Zhang W, Yu L B, et al. Micropillar cavity design for 1.55-μm quantum-dot single-photon sources [J]. Journal of Electronic Science and Technology, 2019, 17(3): 221. [39] Song H Z. Microcavities for silica-fiber based quantum information processing. Chapter 2[M]//Advanced Device Structures, Crotia: InTECH, 2017. [40] Huang S, Zhang W, Xi Q, et al. Robustness study of Si/SiO2-InP microcolumn cavity for 1.55μm single photon source [J]. Laser Technology, 2020, 44(5): 532-537. (in Chinese) [41] Huang S, Xie X, Xu Q, et al. Fabrication tolerance of InGaAsP/InP-Air-Aperture micropillar cavities as 1.55-μm quantum dot single-photon sources [J]. Current Optics and Photonics, 2020, 4(6): 509-515. doi: 10.3807/COPP.2020.4.6.509 [42] Cheng R, Huang S, Xu Q, et al. Research progress of lithium niobate waveguide and its application in quantum information technology[C]//IEEE Xplore/2021 Photonics & Electromagnetics Research Symposium (PIERS), 2022: 877-896. [43] Yu H, Yuan C, Zhang R, et al. Spectrally multiplexed indistinguishable single-photon generation at telecom-band [J]. Photonics Research, 2022, 10(6): 1417-1429. doi: 10.1364/PRJ.450731 [44] Fan Y R, Yuan C Z, Zhang R M, et al. Effect of dispersion on indistinguishability between single-photon wave-packets [J]. Photonics Research, 2021, 9(6): 1134-1143. doi: 10.1364/PRJ.421180 [45] Luo Q, Cheng Z, Fan J, et al. Quantum random number generator based on single-photon emitter in gallium nitride [J]. Optics Letters, 2020, 45(15): 4224-4227. doi: 10.1364/OL.396561 [46] Jennewein T, Simon C, Weihs G, et al. Quantum cryptography with entangled photons [J]. Physical Review Letters, 2000, 84(20): 4729-32. doi: 10.1103/PhysRevLett.84.4729 [47] Mitchell M W, Lundeen J S, Steinberg A M. Super-resolving phase measurements with a multiphoton entangled state [J]. Nature, 2004, 429(6988): 161-164. doi: 10.1038/nature02493 [48] Sun Q C, Mao Y L, Chen S J, et al. Quantum teleportation with independent sources and prior entanglement distribution over a network [J]. Nature Photonics, 2016, 10(10): 671-675. doi: 10.1038/nphoton.2016.179 [49] Li J, Yuan C, Shen S, et al. Discrete frequency-bin entanglement generation via cascaded second-order nonlinear processes in Sagnac interferometer [J]. Optics Letters, 2023, 48(11): 2917-2920. doi: 10.1364/OL.489656 [50] Zhang Z, Yuan C, Shen S, et al. High-performance quantum entanglement generation via cascaded second-order nonlinear processes [J]. npj Quantum Information, 2021, 7(1): 123. doi: 10.1038/s41534-021-00462-7 [51] Fan Y R, Lyu C, Yuan C Z, et al. Multi-wavelength correlated photon pairs generation in Si3N4 microring resonator[C]//2021 IEEE 6th Optoelectronics Global Conference (OGC), 2021: 100-102. [52] Fan Y R, Lyu C, Yuan C Z, et al. High-quality multi-wavelength quantum light sources on silicon nitride micro-ring chip [J]. arXiv preprint, 2022, 2209: 11417. [53] Shen S, Yuan C Z, Zhang Z C, et al. High-performance quantum teleportation systems at telecom C-band[C]//Conference on Lasers and Electro-Optics, 2021: FM3 M. 2. [54] Shen S, Yuan C, Zhang Z, et al. Hertz-rate metropolitan quantum teleportation [J]. Light: Science & Applications, 2023, 12(1): 115. doi: 10.1038/s41377-023-01158-7 [55] Fan Y R, Luo Y, Zhang Z C, et al. Energy-time entanglement coexisting with fiber optical communication at telecom C-band [J]. Physical Review A, To be published. [56] Cheng B T, Dai Q, Xie X M, et al. Research progress of single photon detector [J]. Laser Technology, 2022, 46(5): 601-609. (in Chinese) [57] Li X, Shi Z, Dai Q, et al. 64×64 InGaAs/InP 3D imaging laser focal plane detector [J]. Infrared and Laser Engineering, 2018, 47(8): 0806004. (in Chinese) doi: 10.3788/IRLA201847.0806004 [58] Song H Z. Avalanche photodiode focal plane arrays and their application in laser detection and ranging. Chapter 9[M]//Advances Photodiodes - Research and Application. London: IntechOpen, 2018. [59] Song H Z, Deng J, Dai Q, et al. Quantitative correlation between fabrication precision and device homogeneity of single-photon avalanche diodes [J]. IEEE Transactions on Electron Devices, 2016, 63(12): 4845-4851. doi: 10.1109/TED.2016.2618222 [60] Dai M X, Li X, Shi Z, et al. Gain and noise properties of multi-gain-stage superlattice InGaAs avalanche photodiode [J]. Infrared and Laser Engineering, 2016, 45(5): 0520009. (in Chinese) doi: 10.3788/irla201645.0520009 [61] Yuan F, Lu X L, Jing L, et al. A novel high-Speed photon counting system with programmed dead time[C]//2019 IEEE 4th Optoelectronics Global Conference (OGC), 2019: 85-88. [62] Itzler M A, Jiang X D, Entwistle M, et al. Advances in InGaAsP-based avalanche diode single photon detectors [J]. Journal of Modern Optics, 2011, 58(3/4): 174-200. doi: 10.1080/09500340.2010.547262 [63] Itzle M A, Jiang X, Nyman B, et al. InP-based negative feedback avalanche diodes[C]//Quantum Sensing and Nanophotonic Devices VI, 2009, 7222: 462-473. [64] Li Z P, Huang X, Jiang P Y, et al. Super-resolution single-photon imaging at 8.2 kilometers [J]. Optics Express, 2020, 28(3): 4076. doi: 10.1364/OE.383456 [65] Zhang S, Yuan F, Chen J, et al. Research progress of negative feedback avalanche diode and its application[C]//2 nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 2022: 182-191. [66] Yuan F, Lu X, Ke Z, et al. A design of near-infrared single photon counting integrated module based on InGaAs/InP NFAD[C]//International Conference on Optoelectronic Information and Functional Materials (OIFM 2023), SPIE, 2023, 12781: 205-210. [67] Brida G, Genovese M, Ruo B I. Experimental realization of sub-shot-noise quantum imaging [J]. Nature Photonics, 2010, 4(4): 227-230. doi: 10.1038/nphoton.2010.29 [68] Li B, Zhou Q, Zhang R, et al. Cost-effective high spatial resolution photon-counting OTDR at 850 nm [J]. Applied Optics, 2018, 57(30): 8824-8828. doi: 10.1364/AO.57.008824 [69] Li B, Zhang R, Wang Y, et al. Dispersion independent long-haul photon-counting optical time-domain reflectometry [J]. Optics Letters, 2020, 45(9): 2640-2643. doi: DOI:10.1364/OL.391394 [70] Fan X, Ou Z, Zhang L, et al. Dense temporally multiplexed fiber Bragg grating sensing based on single-photon detection [J]. Journal of Lightwave Technology, 2022, 40(13): 4458-4466. doi: 10.1109/JLT.2022.3158074 [71] Ou Z, Fan X, Zhang L, et al. Effect of spectrum broadening on photon-counting fiber Bragg grating sensing [J]. Optics Express, 2023, 31(5): 8152-8159. doi: 10.1364/OE.482821 [72] Xi Q, Wei S H, Yuan C, et al. Experimental observation of coherent interaction between laser and erbium ions ensemble doped in fiber at sub 10 mK [J]. Science China Information Sciences, 2020, 63(8): 180505. doi: 10.1007/s11432-020-2954-5 [73] Wei S H, Jing B, Zhang X Y, et al. Storage of 1650 modes of single photons at telecom wavelength [J]. npj Quantum Information, 2024, to be published. [74] Wei S H, Jing B, Zhang X Y, et al. Towards real-world quantum networks: A review [J]. Laser & Photonics Reviews, 2022, 16(3): 2100219. doi: 10.1002/lpor.202100219 [75] Lv X M, Fan B Y, Tang J D, et al. The influence of fabrication imperfections in an optomechanical crystal nanobeam cavity[C]//Asia Communications and Photonics Conference/International Conference on Information Photonics and Optical Communications 2020 (ACP/IPOC), 2020: M4 A. 19. [76] Cai Q Z, Fan B, Fan Y R, et al. Entangling optical and mechanical cavity modes in optomechanical crystal nanobeam [J]. Physical Review A, 2023, 108(2): 022419. doi: 10.1103/PhysRevA.108.022419 [77] Tang J D, Cai Q Z, Cheng Z D, et al. A perspective on quantum entanglement in optomechanical systems [J]. Physics Letters A, 2022, 429: 127966. doi: 10.1016/j.physleta.2022.127966 [78] Li W J, Cheng Z D, Kang L Z, et al. Phonon lasing with an atomic thin membrane resonator at room temperature [J]. Optics Express, 2021, 29(11): 16241-16248. doi: 10.1364/OE.423904 [79] Li B L, Guo M L, Chen J F, et al. Very high-frequency, gate-tunable CrPS4 nanomechanical resonator with single mode [J]. Optics Letters, 2023, 48(10): 2571-2574. doi: 10.1364/OL.489345 [80] Xu N, Cheng Z D, Tang J D, et al. Recent advances in nano-opto-electro-mechanical systems [J]. Nanophotonics, 2021, 10(9): 2265-2281. doi: 10.1515/nanoph-2021-0082 -
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